Tribological behavior of alumina doped zinc oxide films grown by pulsed laser deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 5, 2002, Pages 1738-1743

  Prasad, S V ^a   Nainaparampil, J J ^b   Zabinski, J S ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Curtiss Wright Controls Inc   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CHARACTERIZATION; CRYSTALLINE MATERIALS; FILM GROWTH; PIEZOELECTRIC MATERIALS; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; SPECTROMETRY; TEXTURES; TRIBOLOGY; VACUUM APPLICATIONS; WEAR OF MATERIALS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

ENERGY DISPERSIVE X-RAY SPECTROSCOPY (EDS);

THIN FILMS;

EID: 0036748708     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1501567     Document Type: Article

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