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Volumn 14, Issue 1, 1999, Pages 292-301

Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; GLASS; HARDNESS TESTING; MECHANICAL VARIABLES MEASUREMENT; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS;

EID: 0032647950     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0042     Document Type: Article
Times cited : (309)

References (7)
  • 1
    • 0000190960 scopus 로고    scopus 로고
    • Thin Films: Stresses and Mechanical Properties VI, edited by W. W. Gerberich, H. Gao, J-E. Sundgren, and S. P. Baker Pittsburgh, PA
    • T. Y. Tsui, W. C. Oliver, and G. M. Pharr, in Thin Films: Stresses and Mechanical Properties VI, edited by W. W. Gerberich, H. Gao, J-E. Sundgren, and S. P. Baker (Mater. Res. Soc. Symp. Proc. 436, Pittsburgh, PA, 1997), p. 207.
    • (1997) Mater. Res. Soc. Symp. Proc. , vol.436 , pp. 207
    • Tsui, T.Y.1    Oliver, W.C.2    Pharr, G.M.3
  • 6
    • 0343346590 scopus 로고
    • Thin Films: Stresses and Mechanical Properties II, edited by M. Doerner, W. C. Oliver, G. M. Pharr, and F. R. Brotzen Pittsburgh, PA
    • B. D. Fabes and W. C. Oliver, in Thin Films: Stresses and Mechanical Properties II, edited by M. Doerner, W. C. Oliver, G. M. Pharr, and F. R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 127.
    • (1990) Mater. Res. Soc. Symp. Proc. , vol.188 , pp. 127
    • Fabes, B.D.1    Oliver, W.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.