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Volumn 14, Issue 1, 1999, Pages 292-301
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Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
ATOMIC FORCE MICROSCOPY;
ELASTIC MODULI;
GLASS;
HARDNESS TESTING;
MECHANICAL VARIABLES MEASUREMENT;
SCANNING ELECTRON MICROSCOPY;
SPUTTER DEPOSITION;
SUBSTRATES;
THIN FILMS;
NANOINDENTATION TESTS;
METALLIC FILMS;
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EID: 0032647950
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/JMR.1999.0042 Document Type: Article |
Times cited : (309)
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References (7)
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