Evaluation of errors in the measurement of surface roughness at high spatial frequency by atomic force microscopy on a thin film

Japanese Journal of Applied Physics

Volumn 51, Issue 8 PART 4, 2012, Pages

  Wang, Chunmei ^a   Itoh, Hiroshi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED FORCES; CORRELATION LENGTHS; GEOMETRICAL MODELS; HIGH SPATIAL FREQUENCY; IMAGING CONDITIONS; IMAGING FORCE; POLYSILICON FILMS; POWER SPECTRUM DENSITY; PRECISE MEASUREMENTS; PROBE MATERIALS; PROBE SHAPE; ROUGHNESS DISTRIBUTIONS; SAMPLE DEFORMATION;

ATOMIC FORCE MICROSCOPY; MEASUREMENT ERRORS; POLYSILICON; PROBES; ROUGHNESS MEASUREMENT; SURFACES;

SURFACE ROUGHNESS;

EID: 84865266837     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.51.08KB11     Document Type: Article

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