Cantilever tilt causing amplitude related convolution in dynamic mode atomic force microscopy

Analytical Sciences

Volumn 27, Issue 2, 2011, Pages 143-147

  Wang, Chunmei ^a   Sun, Jielin ^a   Itoh, Hiroshi ^b   Shen, Dianhong ^c   Hu, Jun ^d  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c NATIONAL CENTER FOR NANOSCIENCE AND TECHNOLOGY   (China)

^d SHANGHAI INSTITUTE OF APPLIED PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONVOLUTION; NANOCANTILEVERS; PROBES; SILICA; SILICON; TOPOGRAPHY;

ABSOLUTE VALUES; CANTILEVER TILT; CONVOLUTION MODEL; CRITICAL DIMENSION MEASUREMENT; DYNAMIC MODE AFM; QUANTITATIVE CHARACTERIZATION; SUPER-LATTICE STRUCTURES; TYPICAL DESIGN;

ATOMIC FORCE MICROSCOPY;

EID: 79951488222     PISSN: 09106340     EISSN: 13482246     Source Type: Journal    
DOI: 10.2116/analsci.27.143     Document Type: Article

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