Optimization of the ammonium sulfide (NH4)2S passivation process on InSb(111)A

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 30, Issue 4, 2012, Pages

  Zhernokletov, Dmitry M ^a   Dong, Hong ^b   Brennan, Barry ^b   Kim, Jiyoung ^b   Wallace, Robert M ^b  

^a UNIVERSITY OF TEXAS AT DALLAS   (United States)

^b The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; INDIUM ANTIMONIDES; OPTIMIZATION; OPTOELECTRONIC DEVICES; PASSIVATION; PHOTOELECTRONS; SULFUR; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMMONIUM SULFIDE; BULK MOBILITY; LONG WAVELENGTH; NATIVE OXIDES; OPTIMAL PROCESSING; PASSIVATION PROCESS; PROCESSING CONDITION; SEMI-CONDUCTOR SURFACES; SULFUR TREATMENT;

AMMONIUM COMPOUNDS;

EID: 84864255763     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.4719961     Document Type: Article

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