The densification, microstructure, and electrical properties of aluminum-doped zinc oxide sputtering target for transparent conductive oxide film

Journal of the European Ceramic Society

Volumn 32, Issue 12, 2012, Pages 3265-3275

  Wu, Ming Wei ^a   Liu, Day Shan ^a   Su, Yu Hsiang ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Electrical properties; Functional applications; Microstructure final; Sintering; ZnO

Indexed keywords

ALUMINUM-DOPED ZINC OXIDE; AZO FILMS; EXCELLENT PERFORMANCE; FINER GRAINS; FUNCTIONAL APPLICATIONS; HIGH QUALITY; HIGHER TEMPERATURES; MICROSTRUCTURE-FINAL; SINTERED DENSITY; SINTERING PARAMETERS; SPUTTERING TARGET; TRANSPARENT CONDUCTIVE OXIDE FILMS; ZNO;

DENSIFICATION; MICROSTRUCTURE; OPTICAL FILMS; OXIDE FILMS; SINTERING; ZINC OXIDE;

ELECTRIC PROPERTIES;

EID: 84862494246     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2012.04.030     Document Type: Article

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