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Volumn 26, Issue 1-4, 2011, Pages 84-89

Effects of rapid thermal annealing in different ambients on structural, electrical, and optical properties of ZnO thin films by sol-gel method

(6) Li, Jia a,b Huang, Jin Hua a Zhang, Yu Long a Yang, Ye a Song, Wei Jie a Li, Xiao Min b

a NINGBO INSTITUTE OF MATERIALS TECHNOLOGY AND ENGINEERING (China)

b SHANGHAI INSTITUTE OF CERAMICS (China)

Author keywords

Rapid thermal annealing; Sol gel; ZnO thin films

Indexed keywords

AMBIENTS; ANNEALING IN VACUUM; ELECTRICAL AND OPTICAL PROPERTIES; IN-VACUUM; ZNO SURFACE; ZNO THIN FILM; ZNO THIN FILMS;

CARRIER CONCENTRATION; CARRIER MOBILITY; ELECTRIC PROPERTIES; GELS; METALLIC FILMS; OPTICAL FILMS; OXYGEN VACANCIES; RAPID THERMAL ANNEALING; SOL-GEL PROCESS; SOL-GELS; SOLS; THIN FILMS; VACUUM; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

OPTICAL PROPERTIES;

EID: 80051664549 PISSN: 13853449 EISSN: 15738663 Source Type: Journal
DOI: 10.1007/s10832-011-9632-0 Document Type: Article

Times cited : (21)

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