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Volumn 66, Issue 3-4, 2002, Pages 221-226
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Effect of tin oxide dispersion on nodule formation in ITO sputtering
a
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Author keywords
Dispersion; ITO; Nodule; Sputtering target; Tin oxide
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Indexed keywords
DISPERSIONS;
MAGNETRON SPUTTERING;
SCANNING ELECTRON MICROSCOPY;
SUBSTRATES;
THIN FILMS;
TIN OXIDE DISPERSION;
TIN COMPOUNDS;
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EID: 0037136091
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0042-207X(02)00145-8 Document Type: Article |
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Times cited : (63)
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References (14)
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