Surface characteristics of titanium targets and their relevance to sputtering performance

Thin Solid Films

Volumn 517, Issue 6, 2009, Pages 1970-1976

  Sarkar, J ^a   McDonald, P ^a   Gilman, P ^a  

^a PRAXAIR INC   (United States)

Author keywords

Characterization; Deformation; Microstructure; Sputtering; Titanium

Indexed keywords

DEFORMATION; MICROSTRUCTURE; TARGETS; TITANIUM;

BULK TITANIUMS; DEFORMED LAYERS; EARLY LIVES; MACHINING OPERATIONS; SOFT LAYERS; SPUTTERING TARGETS; SURFACE CHARACTERISTICS; SURFACE CONTAMINATIONS; TARGET SURFACES; TITANIUM TARGETS;

SURFACE TREATMENT;

EID: 58149099494     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.10.065     Document Type: Article

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