Investigation on the electrical properties and inhomogeneous distribution of ZnO:Al thin films prepared by dc magnetron sputtering at low deposition temperature

Journal of Applied Physics

Volumn 101, Issue 1, 2007, Pages

  Zhang, X B ^a   Pei, Z L ^a   Gong, J ^a   Sun, C ^a  

^a INSTITUTE OF METAL RESEARCH   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; MONTE CARLO METHODS; ZINC OXIDE;

ACTIVE OXYGEN; ENERGETIC BOMBARDMENT; LANGMUIR PROBES;

THIN FILMS;

EID: 33846326267     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2407265     Document Type: Article

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