Self-limiting oxidation in small-diameter Si nanowires

Chemistry of Materials

Volumn 24, Issue 11, 2012, Pages 2141-2147

  Khalilov, U ^a   Pourtois, G ^a,b   Duin, A C T Van ^c   Neyts, E C ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b IMEC   (Belgium)

^c The Pennsylvania State University   (United States)

Author keywords

molecular dynamics; self limiting oxidation; Si nanowires; simulation

Indexed keywords

COMPLETE OXIDATION; CORE SHELL; HIGHER TEMPERATURES; LOW TEMPERATURES; MOLECULAR DYNAMICS SIMULATIONS; OXIDATION KINETICS; OXIDATION MECHANISMS; OXIDATION PROCESS; OXIDE SHELL; PHOTOVOLTAIC APPLICATIONS; PRECISE CONTROL; SELF-LIMITING PROCESS; SI NANOWIRE; SILICA NANO WIRES; SILICA SHELL; SILICON NANOWIRES; SIMULATION; THERMAL OXIDATION; ULTRA-SMALL; ULTRA-THIN;

FIELD EFFECT TRANSISTORS; MOLECULAR DYNAMICS; NANOWIRES; OXIDATION; OXIDATION RESISTANCE; SHELLS (STRUCTURES); SILICA; SILICON OXIDES;

SILICON;

EID: 84862183556     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm300707x     Document Type: Article

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