Ion implantation of diamond for electronic applications

Semiconductor Science and Technology

Volumn 18, Issue 3, 2003, Pages

  Prins, Johan F ^a  

^a UNIVERSITY OF PRETORIA   (South Africa)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC PROPERTIES; ION IMPLANTATION; PHOSPHORUS; QUENCHING; RADIATION DAMAGE; SEMICONDUCTING BORON; SEMICONDUCTOR DOPING;

INTERSTITIAL DIFFUSION;

SEMICONDUCTING DIAMONDS;

EID: 0037340094     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/18/3/304     Document Type: Article

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