Simultaneous on-chip sensing and actuation using the thermomechanical in-plane microactuator

Journal of Microelectromechanical Systems

Volumn 17, Issue 5, 2008, Pages 1204-1209

  Waterfall, Tyler L ^a   Teichert, Kendall B ^b   Jensen, Brian D ^b  

^a Lands' End Inc   (United States)

^b Brigham Young University   (United States)

Author keywords

Microelectromechanical system (MEMS); Piezoresistance; Thermal actuator

Indexed keywords

ELECTROMECHANICAL DEVICES; KETONES; MEMS; MICROELECTROMECHANICAL DEVICES; SENSOR NETWORKS; SENSORS;

BIOLOGICAL CELLS; DISPLACEMENT OUTPUT; EXPERIMENTAL EVIDENCE; IN-PLANE; MICRO ACTUATORS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEM (MEMS); ON CHIPS; ON-CHIP SENSORS; PIEZORESISTANCE; THERMAL ACTUATOR; THERMAL ACTUATORS;

ACTUATORS;

EID: 53649088892     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2004433     Document Type: Article

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