Simultaneous actuation and displacement sensing for electrostatic drives

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Dong, Jingyan ^a   Ferreira, Placid M ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COST EFFECTIVENESS; MEMS; MODULATION;

ELECTROSTATIC DRIVE; PICO FARADS; POTENTIAL FEEDBACK SIGNAL;

ELECTROSTATIC ACTUATORS;

EID: 42549097297     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035011     Document Type: Article

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