UV-nanoimprint lithography and large area roll-to-roll texturization with hyperbranched polymer nanocomposites for light-trapping applications

Solar Energy Materials and Solar Cells

Volumn 103, Issue , 2012, Pages 147-156

  González Lazo, Marina A ^a   Teuscher, Rémy ^a   Leterrier, Yves ^a   Månson, Jan Anders E ^a   Calderone, Caroline ^b   Hessler Wyser, Aïcha ^b   Couty, Philippe ^c   Ziegler, Yvan ^c   Fischer, Diego ^c  

^a LABORATOIRE DE TECHNOLOGIE DES COMPOSITES ET POLYMÈRES LTC   (Switzerland)

^b EPFL   (Switzerland)

^c Flexcell (VHF Technologies SA)   (Switzerland)

Author keywords

Amorphous silicon; Hyperbranched polymer; Light trapping; Nanocomposite; Roll to roll; UV nanoimprint lithography

Indexed keywords

COHERENCE LENGTHS; HYPERBRANCHED POLYMERS; LIGHT-TRAPPING; OPTICAL ANALYSIS; POLYETHYLENE NAPHTHALATE; PROCESS PRESSURE; PYRAMIDAL STRUCTURES; REFERENCE VALUES; REPLICATION METHOD; ROLL TO ROLL; ROLL-TO-ROLL PROCESS; SCATTERING PROPERTY; SILICA NANOCOMPOSITES; SPECTRAL RANGE; SUBMICRON; TEXTURIZATION; UV NANOIMPRINT LITHOGRAPHY;

AMORPHOUS SILICON; DENDRIMERS; LIGHT SCATTERING; NANOIMPRINT LITHOGRAPHY; NANOPARTICLES; SCANNING ELECTRON MICROSCOPY; SILICA; SUBSTRATES; TEXTURES;

NANOCOMPOSITES;

EID: 84861001323     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2012.04.034     Document Type: Article

References (48)

1. H.W. Deckman, C.R. Wronski, H. Witzke, and E. Yablonovitch Optically enhanced amorphous silicon solar cells Applied Physics Letters 42 1983 968 970
2. C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.J. Haug, T. Soderstrom, C. Ballif, and F. Lederer Comparison and optimization of randomly textured surfaces in thin-film solar cells Optics Express 18 2010 A335 A342
3. R.H. Franken, R.L. Stolk, H. Li, C.H.M. van der Werf, J.K. Rath, and R.E.I. Schropp Understanding light trapping by light scattering textured back electrodes in thin film n-i-p-type silicon solar cells Journal of Applied Physics 102 2007 014503 014507
4. A.W. Smith, and A. Rohatgi Ray tracing analysis of the inverted pyramid texturing geometry for high efficiency silicon solar cells Solar Energy Materials and Solar Cells 29 1993 37 49 (Pubitemid 23611786)
5. J. Krc, M. Zeman, F. Smole, and M. Topic Optical modeling of a-Si:H solar cells deposited on textured glass/SnO2 substrates Journal of Applied Physics 92 2002 749 755
6. H. Stiebig, M. Schulte, C. Zahren, C. Haase, B. Rech, and P. Lechner Light trapping in thin-film silicon solar cells by nano-textured interfaces Proceedings of SPIE 6197 2006 6197011 6197019
7. P. Campbell, and M.A. Green Light trapping properties of pyramidally textured surfaces Journal of Applied Physics 62 1987 243 249
8. K. Söderström, J. Escarré, O. Cubero, F.J. Haug, S. Perregaux, and C. Ballif UV-nano-imprint lithography technique for the replication of back reflectors for n-i-p thin film silicon solar cells Progress in Photovoltaics: Research and Applications 19 2011 202 210
9. C. Battaglia, J. Escarre, K. Soderstrom, M. Charriere, M. Despeisse, F.J. Haug, and C. Ballif Nanomoulding of transparent zinc oxide electrodes for efficient light trapping in solar cells Nature Photonics 5 2011 535 538
10. S. Faÿ, J. Steinhauser, N. Oliveira, E. Vallat-Sauvain, and C. Ballif Opto-electronic properties of rough LP-CVD ZnO:B for use as TCO in thin-film silicon solar cells Thin Solid Films 515 2007 8558 8561 (Pubitemid 47444360)
11. M. Fonrodona, J. Escarré, F. Villar, D. Soler, J.M. Asensi, J. Bertomeu, and J. Andreu PEN as substrate for new solar cell technologies Solar Energy Materials and Solar Cells 89 2005 37 47 (Pubitemid 41023626)
12. S.Y. Chou, P.R. Krauss, W. Zhang, L. Guo, and L. Zhuang Sub-10 nm imprint lithography and applications Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 15 1997 2897 2904 (Pubitemid 127585648)
13. J. Escarre, J. Bertomeu, J.M. Asensi, J. Andreu, V. Terrazzoni-Daudrix, F.J. Haug, X. Niquille, Hot embossing of polymer substrates for thin silicon cell applications, in: Proceedings of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, 2006, pp. 1556-1559.
14. B. Vratzov, A. Fuchs, M. Lemme, W. Henschel, and H. Kurz Large scale ultraviolet-based nanoimprint lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 2003 2760 2764
15. S.H. Ahn, and L.J. Guo High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates Advanced Materials 20 2008 2044 2049
16. L. Schmidt, D. Schmäh, Y. Leterrier, and J.-A. Månson Time-intensity transformation and internal stress in UV-curable hyperbranched acrylates Rheologica Acta 46 2007 693 701
17. L.E. Schmidt, S. Yi, Y.-H. Jin, Y. Leterrier, Y.-H. Cho, and J.-A.E. Månson Acrylated hyperbranched polymer photoresist for ultra-thick and low-stress high aspect ratio micropatterns Journal of Micromechanics and Microengineering 18 2008 045022
18. F. Hussain, M. Hojjati, M. Okamoto, and R.E. Gorga Review article: polymer-matrix nanocomposites, processing, manufacturing, and application: an overview Journal of Composite Materials 40 2006 1511 1575
19. 3 particulates Materials Chemistry and Physics 90 2005 185 195
20. H. Sugimoto, K. Daimatsu, E. Nakanishi, Y. Ogasawara, T. Yasumura, and K. Inomata Preparation and properties of poly(methylmethacrylate)-silica hybrid materials incorporating reactive silica nanoparticles Polymer 47 2006 3754 3759 (Pubitemid 43767398)
21. V. Geiser, Y. Leterrier, and J.-A.E. Månson Conversion and shrinkage analysis of acrylated hyperbranched polymer nanocomposites Journal of Applied Polymer Science 114 2009 1954 1963
22. Y. Leterrier, L. Médico, F. Demarco, J.A.E. Månson, U. Betz, M.F. Escola, M.K. Olsson, and F. Atamny Mechanical integrity of transparent conductive oxide films for flexible polymer-based displays Thin Solid Films 460 2004 156 166
23. Y. Leterrier, A. Pinyol, D. Gilliéron, J.A.E. Månson, P.H.M. Timmermans, P.C.P. Bouten, and F. Templier Mechanical failure analysis of thin film transistor devices on steel and polyimide substrates for flexible display applications Engineering Fracture Mechanics 77 2010 660 670
24. V. Geiser, Y. Leterrier, and J.-A.E. Månson Rheological behavior of concentrated hyperbranched polymer/silica nanocomposite suspensions Macromolecules 43 2010 7705 7712
25. V. Geiser, Y.-H. Jin, Y. Leterrier, and J.-A.E. Månson Nanoimprint lithography with UV-curable hyperbranched polymer nanocomposites Macromolecular Symposia 296 2010 144 153
26. J.R. Condon, and J.L. Ferracane Assessing the effect of composite formulation on polymerization stress The Journal of the American Dental Association 131 2000 497 503
27. V. Geiser, Y. Leterrier, and J.-A.E. Månson Low-stress hyperbranched polymer/silica nanostructures produced by uv-curing, sol-gel processing and nanoimprint lithography Macromolecular Materials and Engineering 297 2012 155 166
28. P. Couty, M. Duchamp, K. Söderström, A. Kovács, R.E. Dunin-Borkowski, L. Sansonnens, Y. Ziegler, Transmission electron microscopy of amorphous tandem thin-film silicon modules produced by a roll-to-roll process on plastic foil, in: Proceedings of the 26th EU PVSEC, 5-9 September 2011, Hamburg, Germany, 2011.
29. M. Izu, and T. Ellison Roll-to-roll manufacturing of amorphous silicon alloy solar cells with in situ cell performance diagnostics Solar Energy Materials and Solar Cells 78 2003 613 626
30. F.J.B. Calleja, and S. Fakirov Microhardness of Polymers 2000 Cambridge University Press
31. V.T. Daudrix, J. Guillet, F. Freitas, A. Shah, C. Ballif, P. Winkler, M. Ferreloc, S. Benagli, X. Niquille, D. Fischer, and R. Morf Characterisation of rough reflecting substrates incorporated into thin-film silicon solar cells Progress in Photovoltaics: Research and Applications 14 2006 485 498 (Pubitemid 44376284)
32. M. Raspanti, E. Binaghi, I. Gallo, and A. Manelli A vision-based, 3D reconstruction technique for scanning electron microscopy: direct comparison with atomic force microscopy Microscopy Research and Technique 67 2005 1 7 (Pubitemid 41023201)
33. J. Löberg, I. Mattisson, S. Hansson, and E. Ahlberg Characterisation of titanium dental implants I: critical assessment of surface roughness parameters The Open Biomaterials Journal 2 2010 18 35
34. F. Elsholz, E. Scholl, and A. Rosenfeld Kinetic Monte Carlo simulations of amorphous thin-film growth Physica Status Solidi B: Basic Solid State Physics 244 2007 3639 3646
35. I. Horcas, R. Fernandez, J.M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A.M. Baro WSXM: a software for scanning probe microscopy and a tool for nanotechnology Review of Scientific Instruments 78 2007 013705 013708
36. R.K. Goyal, A.N. Tiwari, and Y.S. Negi Microhardness of PEEK/ceramic micro- and nanocomposites: correlation with Halpin-Tsai model Materials Science and Engineering: A 491 2008 230 236
37. B. Ramezanzadeh, M. Attar, and M. Farzam Effect of ZnO nanoparticles on the thermal and mechanical properties of epoxy-based nanocomposite Journal of Thermal Analysis and Calorimetry 103 2011 731 739
38. R.W. Rice, P.W. McMillan, and A.J. Stryjak Internal stress dependence of the hardness of crystallized glasses Journal of Materials Science 14 1979 2768 2772
39. J.M. Antunes, A. Cavaleiro, L.F. Menezes, M.I. Simões, and J.V. Fernandes Ultra-microhardness testing procedure with Vickers indenter Surface and Coatings Technology 149 2002 27 35 (Pubitemid 34077806)
40. D. Hull An Introduction to Composite Materials 1981 Cambridge University Press Cambridge, UK
41. Z. Hashin, and S. Shtrikman A variational approach to the theory of the elastic behaviour of polycrystals Journal of the Mechanics and Physics of Solids 10 1962 343 352
42. P.P. Castaneda, and G. Debotton On the homogenized yield strength of two-phase composites Proceedings of the Royal Society of London, Series A: Mathematical and Physical Sciences 438 1992 419 431
43. Z.G. Pandermarakis, and G. Spathis An homogenization procedure for the description of pre- and post-yielding stages of isotropic polymer composites Polymer Composites 29 2008 978 991
44. B. Turcsányi, B. Pukánszky, and F. Tüdõs Composition dependence of tensile yield stress in filled polymers Journal of Materials Science Letters 7 1988 160 162 (Pubitemid 18604604)
45. K.W. Desmond, and E.R. Weeks Random close packing of disks and spheres in confined geometries Physical Review E 80 2009 051305
46. C. Battaglia, K. Söderström, J. Escarre, F.-J. Haug, D. Domine, P. Cuony, M. Boccard, G. Bugnon, C. Denizot, M. Despeisse, A. Feltrin, and C. Ballif Efficient light management scheme for thin film silicon solar cells via transparent random nanostructures fabricated by nanoimprinting Applied Physics Letters 96 2010 213504-213503
47. M.B. Chan-Park, Y.C. Lam, P. Laulia, and S.C. Joshi Simulation and investigation of factors affecting high aspect ratio UV embossing Langmuir: the ACS Journal of Surfaces and Colloids 21 2005 2000 2007 (Pubitemid 40338633)
48. H. Du, J.Q. Xiao, Y.S. Zou, T.G. Wang, J. Gong, C. Sun, and L.S. Wen Optical properties of ultrathin aluminum films deposited by magnetron sputtering in visible band Optical Materials 28 2006 944 949