Kinetic Monte Carlo simulations of amorphous thin-film growth

Physica Status Solidi (B) Basic Research

Volumn 244, Issue 10, 2007, Pages 3639-3646

  Elsholz, F ^a   Scholl E ^a   Rosenfeld, A ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b MAX BORN INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 35348998090     PISSN: 03701972     EISSN: 15213951     Source Type: Journal    
DOI: 10.1002/pssb.200743257     Document Type: Article

References (20)

1. H. Bach and D. Krause (eds.), Thin Films on Glass (Springer, Berlin, Heidelberg, 1997).
2. J. Strümpfel (Von Ardenne Anlagentechnik GmbH, Dresden, Germany), private communication (2005).
3. H. Davies, Proc. Inst. Electr. Eng. 101, 209 (1954).
4. P. J. Chandley, Opt. Quantum Electron. 8, 323 (1976).
5. F. Elsholz, E. Schöll, and A. Rosenfeld, Appl. Phys. Lett. 84, 4167 (2004).
6. A. B. Bortz, M. H. Kalos, and J. L. Lebowitz, J. Comput. Phys. 17, 10 (1975).
7. A. L. Barabási and H. E. Stanley, Fractal concepts in surface growth (Cambridge University Press, Cambridge, UK, 1995).
8. F. Elsholz, E. Schöll, C. Scharfenorth, G. Seewald, H. J. Eichler, and A. Rosenfeld, J. Appl. Phys. 98, 103516 (2005).
9. F. Elsholz, M. Meixner, and E. Schöll, Nucl. Instrum. Methods B 202, 249 (2003).
10. A. C. Dürr, F. Schreiber, K. A. Ritley, V. Kruppa, J. Krug, H. Dosch, and B. Struth, Phys. Rev. Lett. 90, 016104 (2003).
11. S. Yim and T. S. Jones, Phys. Rev. B 73, 161305 (2006).
12. P. Meakin, Fractals, Scaling, and Growth Far from Equilibrium (Cambridge University Press, Cambridge, 1998).
13. Y. Zhao, G.-C. Wang, and T.-M. Lu, Characterization of amorphous and crystalline rough surface: principles and applications, Vol. 37 of Experimental Methods in the Physical Sciences (Academic Press, San Diego, San Francisco, 2001).
14. T. Michely and J. Krug, Islands, Mounds and Atoms, 1st ed. (Springer, Berlin, 2004).
15. T. Karabacak, Y. P. Zhao, G. C. Wang, and T. M. Lu, Phys. Rev. B 64, 085323 (2001).
16. A. Yanguas-Gil, J. Cotrino, A. Barranco, and J. C. Gonzalez, Phys. Rev. Lett. 96, 236101 (2006).
17. D. C. Champeney, Fourier Transforms and their Physical Applications (Academic Press, London and New York, 1973).
18. B.-G. Liu and E. Schöll, Vacuum 61, 145 (2001).
19. N. Kaiser and H. K. Pulker, Optical Interference Coatings (Springer-Verlag, Berlin, Heidelberg, New York, 2003).
20. A. V. Barnat and T.-M. Lu, Pulsed and Pulsed Bias Sputtering - Principles and Applications (Kluwer Academic Publishers, Boston, Dordrecht, New York, London, 2003).