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Nanotechnology

Volumn 23, Issue 21, 2012, Pages

Effect of HCl on the doping and shape control of silicon nanowires

(9) Gentile, P a Solanki, A a Pauc, N a Oehler, F a Salem, B b Rosaz, G a,b Baron, T b Den Hertog, M b Calvo, V a

a UNIV GRENOBLE ALPES (France)

b CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

APPARENT RESISTIVITY; BORON-DOPING; DILUTION RATIO; DOPANT INCORPORATION; GOLD CLUSTERS; HYDROGEN CHLORIDE; IN-SITU DOPING; SHAPE CONTROL; SILICON NANOWIRES; SMOOTH SURFACE; WIRE DIAMETER;

BORON; CHLORINE COMPOUNDS; GOLD; NANOWIRES; PHOSPHORUS; SCANNING ELECTRON MICROSCOPY;

GOLD COMPOUNDS;

HYDROCHLORIC ACID; NANOMATERIAL; SILICON;

ARTICLE; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; PARTICLE SIZE; SURFACE PROPERTY; ULTRASTRUCTURE;

CRYSTALLIZATION; HYDROCHLORIC ACID; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MOLECULAR CONFORMATION; NANOSTRUCTURES; PARTICLE SIZE; SILICON; SURFACE PROPERTIES;

EID: 84860642001 PISSN: 09574484 EISSN: 13616528 Source Type: Journal
DOI: 10.1088/0957-4484/23/21/215702 Document Type: Article

Times cited : (67)

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