메뉴 건너뛰기




Volumn 4, Issue 2, 2004, Pages 245-247

Sequence-Specific Label-Free DNA Sensors Based on Silicon Nanowires

Author keywords

[No Author keywords available]

Indexed keywords

DNA; OLIGONUCLEOTIDE; SILICON;

EID: 1442275478     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl034958e     Document Type: Article
Times cited : (719)

References (16)
  • 8
    • 1442292004 scopus 로고    scopus 로고
    • note
    • The protection of the silicon layer with 50 nm thermal oxide was chosen to prevent the dopant loss during the high temperature activation, and the activation condition used in this study was also carefully selected to generate a uniform distribution of dopant in the silicon layer.
  • 9
    • 1442341000 scopus 로고    scopus 로고
    • note
    • A photolithographic procedure was used to define a photoresist mask over SiNW region, and after the deposition of silicon oxide the masked area was lifted off.
  • 14


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.