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Volumn 30, Issue 12, 2012, Pages 1900-1908

Advances in modeling, design, and fabrication of deep-etched multilayer resonators

Author keywords

Fabry Perot resonators; integrated optics; optical resonators; scattering

Indexed keywords

ABSORBING LAYERS; AVERAGE ERRORS; BEAM DIVERGENCE; COMBINED MODEL; CONTOUR-LITHOGRAPHY METHOD; DEEP REACTIVE ION ETCHING; FABRY-PEROT; FABRY-PEROT RESONATORS; GAUSSIANS; HIGH-ASPECT-RATIO-ETCHING; MULTI-LAYERED STRUCTURE; MULTILAYER RESONATOR; OPTICAL CHARACTERISTICS; REFRACTIVE INDEX SENSOR; SILICON TRENCH; SILICON-AIR INTERFACE; WHITE-LIGHT INTERFEROMETRY;

EID: 84859949263     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2012.2191136     Document Type: Article
Times cited : (39)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.