Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-Gap silicon fabry-pérot cavities

Journal of Microelectromechanical Systems

Volumn 21, Issue 1, 2012, Pages 171-180

  Malak, Maurine ^a   Marty, Frédéric ^a   Pavy, Nicolas ^a   Peter, Yves Alain ^b   Liu, Ai Qun ^c   Bourouina, Tarik ^a  

^a UNIVERSITÉ PARIS EST   (France)

^b ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Curved Fabry P rot cavity; cylindrical bragg reflector; fiber rod lens (FRL); high Q factor; mode selective filter; wavelength selective extinction

Indexed keywords

BIOCHEMICAL SENSING; BRAGG MIRRORS; CAVITY ENHANCEMENT; CAVITY LENGTH; COMPLETE SOLUTIONS; CONTROL PARAMETERS; CYLINDRICAL SURFACE; F-P CAVITIES; GAUSSIAN LIGHT BEAMS; HIGH Q FACTOR; LOSS MECHANISMS; MICROMACHINED; MODE-SELECTIVE FILTER; MULTIPLE REFLECTIONS; OPTICAL CAVITIES; Q-FACTORS; QUALITY FACTORS; ROD LENS; SELECTIVE EXTINCTION; WAVELENGTH SELECTIVITY;

DESIGN; GAUSSIAN BEAMS; MIRRORS; Q FACTOR MEASUREMENT;

WAVELENGTH;

EID: 84858439722     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2174427     Document Type: Article

References (29)

1. L. Y. Lin and E. L. Goldstein, "Opportunities and challenges for MEMS in lightwave communications," IEEE J. Sel. Top. Quantum. Electron., vol. 8, no. 1, pp. 163-172, Jan./Feb. 2002. (Pubitemid 34491566)
2. D. Sadot and E. Boimovich, "Tunable optical filters for dense WDM networks," IEEE Commun. Mag., vol. 36, no. 12, pp. 50-55, Dec. 1998. (Pubitemid 128558615)
3. D. Hohlfeld, M. Epmeier, and H. Zappe, "A thermally tunable, siliconbased optical filter," Sens. Actuators. A, Phys., vol. 103, no. 1/2, pp. 93-99, Jan. 2003.
4. K. Yu and O. Solgaard, "Tunable optical transversal filters based on a Gires-Tournois interferometer with MEMS phase shifters," IEEE J. Sel. Topics Quantum Electron., vol. 10, no. 3, pp. 588-597, May/Jun. 2004.
5. B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, "Free-space tunable and drop optical filters using vertical bragg mirrors on silicon," IEEE J. Sel. Topics Quantum Electron., vol. 12, no. 6, pp. 1480-1488, Nov./Dec. 2006.
6. H. Cai, X. M. Zhang, A. B. Yu, Q. X. Zhang, and A. Q. Liu, "MEMS tuning mechanism for eliminating mode hopping problem in externalcavity lasers," in Proc. 20th IEEE Int. Conf. Micro Electro Mech. Syst., 2007, pp. 159-162.
7. J. Masson, R. St-Gelais, A. Poulin, and Y.-A. Peter, "Tunable fiber laser using a MEMS-based in plane Fabry-Perot filter," J. Quantum Electron., vol. 46, no. 9, pp. 1313-1319, Sep. 2010.
8. W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, " Refractive index measurement of single living cells using on-chip Fabry-Pérot cavity," Appl. Phys. Lett., vol. 89, no. 20, pp. 2039011-2039013, Nov. 2006.
9. R. St.-Gelais, J. Masson, and Y.-A. Peter, "All-silicon integrated Fabry-Pérot cavity for volume refractive index measurement in microfluidic systems," Appl. Phys. Lett., vol. 94, no. 24, pp. 243905-1-243905-3, Jun. 2009.
10. K. Zandi, B. Wong, J. Zou, R. V. Kruzelecky, W. Jamroz, and Y.-A. Peter, "In-plane silicon-on-insulator optical MEMS accelerometer using waveguide Fabry-Perot microcavity with silicon/air bragg mirrors," in Proc. 23rd IEEE Int. Conf. Micro Electro Mech. Syst., 2010, pp. 839-842.
11. G. Lammel, S. Schweizer, and P. Renaud, "MEMS infrared gas spectrometer based on a porous silicon tunable filter," in Proc. 14th IEEE Int. Conf. Micro Electro Mech. Syst., 2001, pp. 578-581. (Pubitemid 32470872)
12. H. Shao, D. Kumar, and K. L. Lear, "Single-cell detection using optofluidic intracavity spectroscopy," IEEE Sensors J., vol. 6, no. 6, pp. 1543-1550, Dec. 2006. (Pubitemid 44955734)
13. W. Liu and J. J. Talghader, "Spatial-mode analysis of micromachined optical cavities using electrothermal mirror actuation," J.Microelectromech. Syst., vol. 15, no. 4, pp. 777-785, Aug. 2006. (Pubitemid 44251385)
14. S. Yun and J. Lee, "A micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline silicon," J. Micromech. Microeng., vol. 13, no. 5, pp. 721-725, Sep. 2003.
15. M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, "Reconfigurable filters using MEMS resonators and integrated optical microcavities," in Proc. IEEE MEMS Conf., 2008, pp. 766-769.
16. A. Lipson and E. M. Yeatman, "A 1-D photonic band gap tunable optical filter in (110) silicon," J. Microelectromech. Syst., vol. 16, no. 3, pp. 521-527, Jun. 2007. (Pubitemid 47243485)
17. A. Yariv, Quantum Electronics, 3rd ed. Hoboken, NJ: Wiley, 1989.
18. M. Malak, N. Pavy, F. Marty, and T. Bourouina, "Mode-selective optical filtering and wavelength-selective switching through Fabry-Perot cavity with cylindrical reflectors," in Proc. 16th Int. Conf. Solid-State Sens., Actuators Microsyst., Transducers, Beijing, China, 2011, pp. 534-537.
19. M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, "Stable, high-Q Fabry-Perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors," in Proc. 24th IEEE Int. Conf. Micro Electro Mech. Syst., 2011, pp. 720-723.
20. T. Bourouina, T.Masuzawa, and H. Fujita, "The MEMSNAS process: Microloading effect for micromachining 3D structures of nearly all shapes," J. Microelectromech. Syst., vol. 13, no. 2, pp. 190-199, Apr. 2004.
21. F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, "Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro and NanoStructures," Microelectron. J., vol. 36, no. 7, pp. 673-677, Jul. 2005. (Pubitemid 40973309)
22. G. D. Boyd and J. P. Gordon, "Confocal multimode resonator for millimeter through optical wavelength masers," Bell Syst. Tech. J., vol. 40, pp. 489-508, 1961.
23. A. G. Fox and T. Li, "Modes in a maser interferometer with curved and tilted mirrors," Proc. IEEE, vol. 51, no. 1, pp. 80-89, Jan. 1963.
24. K. Yu, N. Park, D. Lee, and O. Solgaard, "A wavelength selective switch with flat passband using a free-space grating and MEMS phase-shifters," in Proc. QELS Conf., Baltimore, MD, May 22, 2005, vol. 2, pp. 978-980. (Pubitemid 41496536)
25. B. Saadany, D. Khalil, and T. Bourouina, "Highly efficientmicromachined bragg mirrors using advanced DRIE process," in Proc. IEEE Int. Conf. MEMS, NANO Smart Syst., Cairo, Egypt, Dec. 2006, pp. 48-51.
26. H. A. Macleod, Thin Film Optical Filters. London, U.K.: Inst. Phys. Publ., 2001.
27. Y. Mita, M. Kubota, M. Sugiyama, F.Marty, T. Bourouina, and T. Shibata, "Aspect ratio dependent scalloping attenuation in DRIE and an application to low-loss fiber-optical switch," in Proc. IEEE MEMS Conf., Istanbul, Turkey, Jan. 22-26, 2006, pp. 114-117. (Pubitemid 44592243)
28. M. Malak, T. Bourouina, N. Pavy, E. Richalot, F. Marty, and A.-Q. Liu, "Design, modeling and characterization of stable, high Q-factor curved Fabry-Pérot cavities," J. Microsyst. Technol., vol. 17, no. 4, pp. 543-552, Apr. 2011.
29. R. S. Tucker, D. M. Baney, W. V. Sorin, and C. A. Flory, "Thermal noise and radiation pressure in MEMS Fabry-Perot tunable filters and lasers," IEEE J. Sel. Topics Quantum Electron., vol. 8, no. 1, pp. 88-97, Jan./Feb. 2002. (Pubitemid 34491557)