A micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline silicon

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 721-725

  Yun, Sung Sik ^a   Lee, Jong Hyun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELECTRIC POTENTIAL; MICROMACHINING; OPTICAL FIBERS; REACTIVE ION ETCHING; SILICON WAFERS; THERMAL EFFECTS;

CRYSTALLINE SILICON; DEEP REACTIVE ION ETCHING; SILICON ON INSULATOR WAFER; THERMAL OXIDE REMOVAL; THERMO OPTIC EFFECT; TUNABILITY; TUNABLE OPTICAL FILTER;

OPTICAL FILTERS;

EID: 0141607071     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/326     Document Type: Article

References (15)

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