Dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by infrared radiation

Review of Scientific Instruments

Volumn 83, Issue 1, 2012, Pages

  Kwon, Beomjin ^a   Rosenberger, Matthew ^a   Bhargava, Rohit ^a,b,c   Cahill, David G ^a   King, William P ^a,b  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BI-MATERIAL; BI-MATERIAL CANTILEVER; CANTILEVER DISPLACEMENT; DETECTION LIMITS; INCIDENT FLUX; INCIDENT POWER; INCIDENT RADIATION; MICRO-CANTILEVERS; MODULATION FREQUENCIES; PERIODIC HEATING; SENSITIVITY IMPROVEMENTS; SIGNAL TO NOISE; THERMAL EXPANSION MISMATCH; THERMO-MECHANICAL; THICK COATINGS;

COMPOSITE MICROMECHANICS; INFRARED RADIATION;

NANOCANTILEVERS;

ARTICLE; HEAT; INFRARED RADIATION; INSTRUMENTATION; LASER; LIGHT RELATED PHENOMENA; MECHANICS; MICROTECHNOLOGY; THERMAL CONDUCTIVITY;

HOT TEMPERATURE; INFRARED RAYS; LASERS; MECHANICAL PROCESSES; MICROTECHNOLOGY; OPTICAL PROCESSES; THERMAL CONDUCTIVITY;

EID: 84859201074     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3680107     Document Type: Review

References (33)

1. J. R. Barnes, R. J. Stephenson, M. E. Welland, C. Gerber, and J. K. Gimzewski, Nature (London) 372, 79 (1994). 10.1038/372079a0
2. J. R. Barnes, R. J. Stephenson, C. N. Woodburn, S. J. Oshea, M. E. Welland, T. Rayment, J. K. Gimzewski, and C. Gerber, Rev. Sci. Instrum. 65, 3793 (1994). 10.1063/1.1144509
3. P. G. Datskos, N. V. Lavrik, and S. Rajic, Rev. Sci. Instrum. 75, 1134 (2004). 10.1063/1.1667257
4. P. G. Datskos, P. I. Oden, T. Thundat, E. A. Wachter, R. J. Warmack, and S. R. Hunter, Appl. Phys. Lett. 69, 2986 (1996). 10.1063/1.117752
5. B. Kwon, C. Wang, K. Park, R. Bhargava, and W. P. King, Nanoscale Microscale Thermophys. Eng. 15, 16 (2011). 10.1080/15567265.2010.502925
6. J. Lai, T. Perazzo, Z. Shi, and A. Majumdar, Sens. Actuators, A 58, 113 (1997). 10.1016/S0924-4247(96)01401-X
7. J. Varesi, J. Lai, T. Perazzo, Z. Shi, and A. Majumdar, Appl. Phys. Lett. 71, 306 (1997). 10.1063/1.120440
8. D. A. Fishman, C. Cirloganu, S. Webster, L. A. Padilha, M. Monroe, D. J. Hagan, and E. W. Van Stryland, Nat. Photonics 5, 561 (2011). 10.1038/nphoton.2011.168
9. C. W. Van Neste, L. R. Senesac, D. Yi, and T. Thundat, Appl. Phys. Lett. 92, 134102 (2008). 10.1063/1.2901145
10. V. Pini, B. Tiribilli, C. M. C. Gambi, and M. Vassalli, Phys. Rev. B 81, 054302 (2010). 10.1103/PhysRevB.81.054302
11. D. Ramos, J. Tamayo, J. Mertens, and M. Calleja, J. Appl. Phys. 99, 124904 (2006). 10.1063/1.2205409
12. M. Vassalli, V. Pini, and B. Tiribilli, Appl. Phys. Lett. 97, 143105 (2010). 10.1063/1.3497074
13. H. Yamashita, N. Kodera, A. Miyagi, T. Uchihashi, D. Yamamoto, and T. Ando, Rev. Sci. Instrum. 78, 083702 (2007). 10.1063/1.2766825
14. A. M. Moulin, R. J. Stephenson, and M. E. Welland, J. Vac. Sci. Technol. B 15, 590 (1997). 10.1116/1.589297
15. D. Sarid, Scanning Force Microscopy: With Applications to Electric, Magnetic, and Atomic Forces (Oxford University Press, New York, 1994).
16. S. Shen, A. Narayanaswamy, S. Goh, and G. Chen, Appl. Phys. Lett. 92, 063509 (2008). 10.1063/1.2829999
17. A. Pytel and J. Kiusalaas, Mechanics of Materials (Brooks and Cole, California, 2003).
18. B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics, 2nd ed. (Wiley, Hoboken, NJ, 2007).
19. M. Toda, T. Ono, F. Liu, and I. Voiculescu, Rev. Sci. Instrum. 81, 055104 (2010). 10.1063/1.3397320
20. P. Eriksson, J. Y. Andersson, and G. Stemme, J. Microelectromech. Syst. 6, 55 (1997). 10.1109/84.557531
21. D. W. Hess, Annu. Rev. Mater. Sci. 16, 163 (1986). 10.1146/annurev.ms.16. 080186.001115
22. S. Huang, B. Li, and X. Zhang, Sens. Actuators, A 130-131, 331 (2006). 10.1016/j.sna.2005.09.012
23. M. Klanjek Gunde and M. Maek, Phys. Status Solidi A 183, 439 (2001). 10.1002/1521-396X(200102)183:2439::AID-PSSA4393.0.CO;2-B
24. J.-P. Bourgoin, G.-G. Allogho, and A. Hache, J. Appl. Phys. 108, 073520 (2010). 10.1063/1.3490185
25. S. P. Gurrum, W. P. King, Y. K. Joshi, and K. Ramakrishna, J. Heat Transfer 130, 082403 (2008). 10.1115/1.2928014
26. M. Asheghi, K. Kurabayashi, R. Kasnavi, and K. E. Goodson, J. Appl. Phys. 91, 5079 (2002). 10.1063/1.1458057
27. P. Moin, Fundamentals of Engineering Numerical Analysis, 2nd ed. (Cambridge University Press, New York, 2010).
28. K. Park, J. Lee, Z. M. M. Zhang, and W. P. King, J. Microelectromech. Syst. 16, 213 (2007). 10.1109/JMEMS.2006.889498
29. K. J. Kim and W. P. King, Appl. Therm. Eng. 29, 1631 (2009). 10.1016/j.applthermaleng.2008.07.019
30. A. Narayanaswamy and N. Gu, J. Heat Transfer 133, 042401 (2011). 10.1115/1.4001126
31. P. Yeh, Optical Waves in Layered Media (Wiley, Hoboken, NJ, 2005).
32. Handbook of Optical Constants of Solids, edited by, E. D. Palik, (Academic, New York, 1985).
33. Z. Yang, M. Minyao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, J. Microelectromech. Syst. 11, 136 (2002). 10.1109/84.993448