Thermomechanical sensitivity of microcantilevers in the mid-infrared spectral region

Nanoscale and Microscale Thermophysical Engineering

Volumn 15, Issue 1, 2011, Pages 16-27

  Kwon, B ^a   Wang, C ^a   Park, K ^b   Bhargava, R ^a   King, W P ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b The University of Rhode Island   (United States)

Author keywords

bimaterial; FT IR microscopy; infrared; microcantilevers; modeling; monochromator; photothermal; thermomechanical

Indexed keywords

BI-MATERIAL; FT-IR MICROSCOPY; INFRARED; MICRO-CANTILEVERS; MODELING; PHOTO-THERMAL; THERMO-MECHANICAL;

CHEMICAL DETECTION; COMPOSITE MICROMECHANICS; FOURIER TRANSFORMS; INFRARED DEVICES; INFRARED IMAGING; LIGHT SOURCES; METALLIC FILMS; MONOCHROMATORS; OPTICAL SYSTEMS; SILICON NITRIDE; SPECTROSCOPY; SPECTRUM ANALYZERS;

NANOCANTILEVERS;

EID: 79951834143     PISSN: 15567265     EISSN: None     Source Type: Journal    
DOI: 10.1080/15567265.2010.502925     Document Type: Article

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