Photothermal measurements at picowatt resolution using uncooled micro-optomechanical sensors

Applied Physics Letters

Volumn 71, Issue 3, 1997, Pages 306-308

  Varesi, J ^a   Lai, J ^a   Perazzo, T ^a   Shi, Z ^a   Majumdar, A ^a,b  

^a University of California at Santa Barbara   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; CALCULATIONS; ELECTROOPTICAL DEVICES; INFRARED RADIATION; PHOTONS; THERMAL VARIABLES MEASUREMENT;

MICRO OPTOMECHANICAL SENSOR; PHOTOTHERMAL MEASUREMENT; PYROELECTRIC DEVICE; SILICON NITRIDE CANTILEVER;

INFRARED DETECTORS;

EID: 0031191969     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120440     Document Type: Article

References (14)

1. J. L. Miller, Principles of Infrared Technology (Van Nostrand Reinhold, New York, 1994).
2. J. K. Gimzewski, Ch. Gerber, E. Meyer, and R. R. Schlittier, Chem. Phys. Lett. 217, 589 (1994).
3. J. R. Barnes, S. J. Stephenson, M. E. Weiland, Ch. Gerber, and J. K. Gimzewski, Nature (London) 372, 79 (1994).
4. J. R. Barnes, S. J. Stephenson, C. N. Woodburn, S. J. O'Shea, M. E. Weiland, T. Rayment, J. K. Gimzewski, and Ch. Gerber. Rev. Sci. Instrum. 65, 3793 (1994).
5. T. Thundat, S. L. Sharp, W. G. Fisher, R. J. Warmack, and E. A. Wachter, Appl. Phys. Lett. 66, 1563 (1995).
6. E. A. Wachter and T. Thundat, Rev. Sci. Instrum. 66, 3662 (1995).
7. O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).
8. P. I. Oden, P. G. Datskos, T. Thundat, E. A. Wachter, and R. J. Warmack, Appl. Phys. Lett. 69, 3277 (1996); P. I. Oden, P. G. Datskos, T. Thundat, and E. A. Wachter, ibid. 69, 2986 (1996).
9. P. I. Oden, P. G. Datskos, T. Thundat, E. A. Wachter, and R. J. Warmack, Appl. Phys. Lett. 69, 3277 (1996); P. I. Oden, P. G. Datskos, T. Thundat, and E. A. Wachter, ibid. 69, 2986 (1996).
10. J. Lai, T. Perazzo, Z. Shi, and A. Majumdar, Sensors and Actuators (in press).
11. We used the AFM head of Nanoscope III and silicon nitride cantilevers used in AFMs from Digital Instruments, 520 E. Montecito St., Santa Barbara. CA 93103.
12. D. Sarid, Scanning Force Microscopy with Application to Electric, Magnetic, and Atomic Forces (Oxford University Press, New York, 1991).
13. D. Rugar, C. S. Yannoni, and J. A. Sidles, Nature (London) 360, 563 (1992).
14. K. Wago, O. Züger, R. Kendrick, C. S. Yannoni, and D. Rugar, J. Vac. Sci. Technol. B 14, 1197 (1996).