Remote infrared radiation detection using piezoresistive microcantilevers

Applied Physics Letters

Volumn 69, Issue 20, 1996, Pages 2986-2988

  Datskos, P G ^a,b   Oden, P I ^a,b   Thundat, T ^a   Wachter, E A ^a   Warmack, R J ^a,b   Hunter, S R ^a,c  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

^c Consultec Scientific Inc ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); BRIDGE CIRCUITS; CALCULATIONS; ELECTRIC RESISTANCE; INFRARED RADIATION; PIEZOELECTRIC DEVICES; SPECTROMETERS; TEMPERATURE MEASUREMENT; THERMAL EFFECTS; VOLTAGE MEASUREMENT;

NOISE EQUIVALENT POWER; PIEZORESISTIVE MICROCANTILEVERS; SPECTRAL RESPONSE; WHEATSTONE BRIDGE CIRCUIT;

OPTICAL SENSORS;

EID: 0030288006     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117752     Document Type: Article

References (27)

1. R. A. Wood and N. A. Foss, Laser Focus World June, 101 (1993).
2. A. Rogalski, Infrared Phys. Technol. 35, 1 (1994).
3. R. A. Wood, Infrared Technology XXI [Proc. SPIE 2020, 322 (1993)].
4. C. Hanson, Infrared Technology XXI [Proc. SPIE 2020, 330 (1993)].
5. J. L. Miller, Principles of Infrared Technology (Van Nostram Reinhold, New York, 1994).
6. E. L. Dereniak and G. D. Boreman, Infrared Detectors and Systems (Wiley, New York, 1996).
7. D. Sarid, Scanning Force Microscopy (Oxford University Press, New York, 1991).
8. J. R. Barnes, R. J. Stephenson, M. E. Welland, C. Gerber, and J. K. Gimzewski, Nature (London) 372, 79 (1994).
9. E. A. Wachter, T. Thundat, P. G. Datskos, P. I. Oden, S. L. Sharp, and R. J. Warmack, Rev. Sci. Instrum. (in press).
10. Available from Park Instruments, Sunnyvale, CA 94089.
11. Available from Digital Instruments, Santa Barbara, CA 93103.
12. F. J. Giessibl and B. M. Trafas, Rev. Sci. Instrum. 65, 1923 (1994).
13. J. K. Gimzewski, C. Gerber, E. Meyer, and R. R. Schlittler, Chem. Phys. Lett. 217, 589 (1994).
14. J. K. Gimzewski, C. Gerber, E. Meyer, and R. R. Schlittler, in Micromechanical Heat Sensor: Observation of a Chemical Reaction, Photon and Electrical Heat Pulses (Kluwer, Dordrecht, 1995), p. 123.
15. J. R. Barnes et al. Rev. Sci. Instrum. 65, 3793 (1994).
16. E. Meyer, J. K. Ginzewski, C. Gerber, and R. R. Schlittler, in Micromechanical calorimeter with picojoule sensitivity (Kluwer, Dordrecht, 1995), p. 89.
17. O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lia, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).
18. N. Umeda, S. Ishizaki, and H. Uwai, J. Vac. Sci. Technol. B 9, 1318 (1991).
19. M. Allegrini, C. Astoli, P. Baschieri, F. Dinneli, C. Frediani, A. Lio, and T. Mariani, Ultramicroscopy 42-44, 371 (1992).
20. O. Marti, A. Ruf, M. Hipp, B. Bielefeldt, J. Colchero, and J. Mlynek, Ultramicroscopy 42-44, 345 (1992).
21. J. Mertz, O. Marti, and J. Mylnek, Appl. Phys. Lett. 62, 2344 (1993).
22. T. Thundat, R. J. Warmack, G. Y. Chen, and D. P. Allison, Appl. Phys. Lett. 64, 2894 (1994).
23. G. Y. Chen, T. Thundat, E. A. Wachter, and R. J. Warmack, J. Appl. Phys. 77, 3618 (1995).
24. W. C. Young, Roark's Formulas for Stress and Strain, 6th ed. (McGraw-Hill, New York, 1989).
25. P. I. Oden, E. A. Wachter, P. G. Datskos, T. Thundat, and R. J. Warmack, Infrared Technology XXII [Proc. SPIE 2744, 345 (1996)].
26. M. Tortonese, R. C. Barrett, and C. F. Quate, Appl. Phys. Lett. 62, 834 (1993).
27. F. J. Giessibl, Jpn. J. Appl. Phys. 1 33, 3726 (1994).