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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 3, 1997, Pages 590-596

Micromechanical thermal sensors: Comparison of experimental results and simulations

(3) Moulin, A M a Stephenson, R J a Welland, M E a

a UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343378445 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.589297 Document Type: Review

Times cited : (15)

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