Optimization and performance of high-resolution micro-optomechanical thermal sensors

Sensors and Actuators, A: Physical

Volumn 58, Issue 2, 1997, Pages 113-119

  Lai, Jie ^a,c,d,e,f   Perazzo, Tom ^a,d   Shi, Zheng ^a,g   Majumdar, Arun ^a,b,h  

^a University of California   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c SHANGHAI JIAO TONG UNIVERSITY   (China)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e ZHEJIANG UNIVERSITY   (China)

^f Maxon Corp   (United States)

^g FLORIDA INTERNATIONAL UNIVERSITY   (United States)

^h UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Bi material microcantilevers; Design optimization; Thermal sensors

Indexed keywords

INFRARED DETECTORS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

BI-MATERIAL MICROCANTILEVERS; THERMAL SENSORS;

OPTICAL SENSORS;

EID: 0031060755     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01401-X     Document Type: Article

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