Optimization and performance of high-resolution micro-optomechanical thermal sensors

Sensors and Actuators, A: Physical

Volumn 58, Issue 2, 1997, Pages 113-119

  Lai, Jie ^a,c,d,e,f   Perazzo, Tom ^a,d   Shi, Zheng ^a,g   Majumdar, Arun ^a,b,h  

^a University of California at Santa Barbara   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c SHANGHAI JIAO TONG UNIVERSITY   (China)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e ZHEJIANG UNIVERSITY   (China)

^f Maxon Corp   (United States)

^g FLORIDA INTERNATIONAL UNIVERSITY   (United States)

^h UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Bi material microcantilevers; Design optimization; Thermal sensors

Indexed keywords

INFRARED DETECTORS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

BI-MATERIAL MICROCANTILEVERS; THERMAL SENSORS;

OPTICAL SENSORS;

EID: 0031060755     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01401-X     Document Type: Article

References (13)

1. S.G. Eskin and J.R. Fritze, Thermostatic bimetals, Trans. ASME, 48 (1940) 433-442.
2. E.O. Doebelin, Measurement Systems: Application and Design, McGraw-Hill, New York, 4th edn., 1990.
3. J.K. Gimzewski, Ch. Gerber, E. Meyer and R.R. Schlittler, Observation of a chemical reaction using a micromechanical sensor, Chem. Phys. Lett., 217 (1994) 589-594.
4. J.R. Barnes, S.J. Stephenson, M.E. Welland, Ch. Gerber and J.K. Gimzewski, Photothermal spectroscopy with femtojoule sensitive using a micromechanical device, Nature, 372 (1994) 79-82.
5. J.R. Barnes, S.J. Stephenson, C.N. Woodburn, S.J. O'Shea, M.E. Welland, T. Rayment, J.K. Gimzewski and Ch. Gerber, A femtojoule calorimeter using micromechanical sensors, Rev. Sci. Instrum., 65 (1994) 3793-3798.
6. T. Thundat, S.L. Sharp, W.G. Fisher, R.J. WarmackandE.A. Wachter, Micromechanical radiation dosimeter, Appl. Phys. Lett., 66 (1995) 1563-1565.
7. E.A. Wachter and T. Thundat, Micromechanical sensors for chemical and physical measurements, Rev. Sci. Instrum., 66 (1995) 3662-3667.
8. O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai and A. Majumdar, Scanning thermal imaging microscopy using composite cantilever probes, Appl. Phys. Lett., 66 (1995) 694-696.
9. D. Sarid, Scanning Force Microscopy with Application to Electric, Magnetic, and Atomic Forces, Oxford University Press, New York, 1991.
10. R.J. Roark and W.C. Young, Formulas for Stress and Strain, McGraw-Hill, New York, 5th edn., 1972.
11. D. Rugar, C.S. Yannoni and J.A. Sidles, Mechanical detection of magnetic resonance, Nature, 360 (1992) 563-565.
12. D.A. Walters, J.P. Cleveland, N.H. Thomson, P.K. Hansma, M.A. Wendman, G. Gurley and V. Elings, Short cantilevers for atomic force microscopy, Rev. Sci. Instrum., 67 (1996) 3583-3590.
13. M.V. Salapaka, H.S. Bergh, J. Lai, A. Majumdar and E. McFarland, Multimode noise analysis of cantilevers for scanning probe microscopes, J. Appl. Phys., 81 (1997) 2480-2487.