Synthesis and electroplating of high resolution insulated carbon nanotube scanning probes for imaging in liquid solutions

Nanotechnology

Volumn 23, Issue 14, 2012, Pages

  Roberts, N A ^a   Noh, J H ^a   Lassiter, M G ^b   Guo, S ^c   Kalinin, S V ^c   Rack, P D ^a,c  

^a University of Tennessee   (United States)

^b AEgis Technologies   (United States)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES (CNTS); ENERGY STORAGE AND CONVERSIONS; HIGH RESOLUTION; LARGE ASPECT RATIO; LIQUID SOLUTION; NANO SCALE; SCANNING PROBES;

ASPECT RATIO; CARBON NANOTUBES; DIELECTRIC FILMS; ELECTRON BEAMS; ETCHING; SCANNING PROBE MICROSCOPY; SYNTHESIS (CHEMICAL);

ELECTROPLATING SOLUTIONS;

CARBON NANOTUBE; GOLD;

ARTICLE; CHEMISTRY; ELECTROPLATING INDUSTRY; METHODOLOGY; MOLECULAR PROBE; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY; SOLUTION AND SOLUBILITY; SYNTHESIS; ULTRASTRUCTURE;

ELECTROPLATING; GOLD; MICROSCOPY, ELECTRON, SCANNING; MICROSCOPY, SCANNING PROBE; MOLECULAR PROBES; NANOTECHNOLOGY; NANOTUBES, CARBON; SOLUTIONS;

EID: 84858813456     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/14/145301     Document Type: Article

References (35)

1. Tarascon J M and Armand M 2001 Issues and challenges facing rechargeable lithium batteries Nature 414 35967 (Pubitemid 33100023)
2. Kalinin S V and Balke N 2010 Local electrochemical functionality in energy storage materials and devices by scanning probe microscopies: status and perspectives Adv. Mater. 22 E193209
3. Kumar A et al 2011 Measuring oxygen reduction/evolution reactions on the nanoscale Nature Chem. 3 70713
4. Balke N et al 2010 Nanoscale mapping of ion diffusion in a lithium-ion battery cathode Nature Nanotechnol. 5 74954
5. Macpherson J V and Unwin P R 2000 Combined scanning electrochemical- atomic force microscopy Anal. Chem. 72 10
6. Frederix P et al 2005 Assessment of insulated conductive cantilevers for biology and electrochemistry Nanotechnology 16 997
7. Zoski C G, Liu B and Bard A J 2004 Scanning electrochemical microscopy: theory and characterization of electrodes of finite conical geometry Anal. Chem. 76 9
8. Drake B et al 1989 Imaging crystals, polymers, and processes in water with atomic microsope Science 243 4
9. Engel A and Muller D J 2000 Observing single biomolecules at work with the atomice force microscope Nature Struct. Biol. 7 4
10. Frederix P et al 2008 Conductive supports for combined AFMSECM on biological membranes Nanotechnology 19 384004
11. Akiyama T et al 2004 Development of insulated conductive probes with platinum silicide tips for atomic force microscopy in cell biology Japan. J. Appl. Phys. 43 38657
12. Noh J H et al 2010 Nanofabrication of insulated scanning probes for electromechanical imaging in liquid solutions Nanotechnology 21 365302
13. Rodriguez B J et al 2007 Fabrication, dynamics, and eletrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids Appl. Phys. Lett. 91 093130
14. Wong S S et al 1998 Carbon nanotube tips: high-resolution probes for imaging biological systems J. Am. Chem. Soc. 120 6034 (Pubitemid 28067836)
15. Randolph S J, Fowlkes J D and Rack P D 2006 Focused, nanoscale electron-beam-induced deposition and etching Crit. Rev. Solid State Mater. Sci. 31 5589 (Pubitemid 44603985)
16. Utke I, Hoffmann P and Melngailis J 2008 Gas-assisted focused electron beam and ion beam processing and fabrication J. Vac. Sci. Technol. B 26 1197276
17. van Dorp W F and Hagen C W 2008 A critical literature review of focused electron beam induced deposition J. Appl. Phys. 104 081301
18. Lobo C J et al 2008 High resolution radially symmetric nanostructures from simultaneous electron beam induced etching and deposition Nanotechnology 19 025303
19. Rack P D et al 2003 Nanoscale electron-beam-stimulated processing Appl. Phys. Lett. 82 23268
20. Randolph S J, Fowlkes J D and Rack P D 2005 Focused electron-beam induced etching of silicon dioxide J. Appl. Phys. 98 034902
21. Lassiter M G, Liang T and Rack P D 2008 Inhibiting spontaneous etching of nanoscale electron beam induced etching features: solutions for nanoscale repair of extreme ultraviolet lithography J. Vac. Sci. Technol. B 26 9637 (Pubitemid 351776799)
22. Lassiter M G and Rack P D 2008 Nanoscale electron beam induced etching: a continuum model that correlates the etch profile to the experimental parameters Nanotechnology 19 455306
23. 2 vapor Appl. Phys. Lett. 34 703
24. Kohlmann K T, Thiemann M and Brunger W H 1991 E-beam induced x-ray mask repair with optimized gas nozzle geometry Microelectron. Eng. 13 27982 (Pubitemid 21665459)
25. Roediger P et al 2010 Focused electron beam induced etching of silicon using chlorine Nanotechnology 21 285306
26. Roediger P et al 2010 Focused electron beam induced etching of silicon by chlorine gas: negative effects of residual gas contamination on the etching process J. Appl. Phys. 108 8
27. 6 J. Vac. Sci. Technol. B 28 4
28. Goler S et al 2011 Self-assembly and electron-beam-induced direct etching of suspended graphene nanostructures J. Appl. Phys. 110 064308
29. Roediger P et al 2011 Crystallinity-retaining removal of germanium by direct-write focused electron beam induced etching J. Vac. Sci. Technol. B 29 041801
30. 2 Nanotechnology 22 265304
31. 2 gas-assisted focused-electron-beam-induced etching of GaAs with 30 nm resolution Nanotechnology 22 045301
32. Yemini M et al 2009 The controlled fabrication of nanopores by focused electron-beam-induced etching Nanotechnology 20 245302
33. Yuzvinsky T D et al 2005 Precision cutting of nanotubes with a low-energy electron beam Appl. Phys. Lett. 86 053109
34. Collins P G et al 2001 Current saturation and electrical breakdown in multiwalled carbon nanotubes Phys. Rev. Lett. 86 312831 (Pubitemid 32317878)
35. Wei B Q, Vajtai R and Ajayan P M 2001 Reliability and current carrying capacity of carbon nanotubes Appl. Phys. Lett. 79 11724 (Pubitemid 33596872)