The controlled fabrication of nanopores by focused electron-beam-induced etching

Nanotechnology

Volumn 20, Issue 24, 2009, Pages

  Yemini, M ^a,b   Hadad, B ^a   Liebes, Y ^a   Goldner, A ^a   Ashkenasy, N ^a  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

^b Shamoon College of Engineering   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ETCHING; ELECTRON-BEAM EXPOSURE; ELEMENTAL SILICON; FOCUSED ELECTRON BEAMS; LINEAR DEPENDENCE; MASS TRANSPORT; NANOMETRIC HOLES; NANOPORE SIZE; OPTIMAL PRESSURE; PORE DIAMETERS; PORE FORMATION; PROCESS CYCLES; PROCESS PARAMETERS; SILICON NITRIDE MEMBRANE; SILICON-BASED; SIZE AND SHAPE;

ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRONS; ETCHING; FABRICATION; NANOPORES; SILICON NITRIDE;

PROCESS CONTROL;

SILICON; SILICON NITRIDE; NANOMATERIAL; SILICON DERIVATIVE;

ARTICLE; CHANNEL GATING; ELECTRON BEAM; MOLECULAR ELECTRONICS; NANOPORE; NANOTECHNOLOGY; PRIORITY JOURNAL; RADIATION EXPOSURE; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; ELECTRON; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; PARTICLE SIZE; POROSITY; SURFACE PROPERTY; ULTRASTRUCTURE;

CRYSTALLIZATION; ELECTRONS; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MOLECULAR CONFORMATION; NANOSTRUCTURES; NANOTECHNOLOGY; PARTICLE SIZE; POROSITY; SILICON COMPOUNDS; SURFACE PROPERTIES;

EID: 67649184581     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/24/245302     Document Type: Article

References (28)

1. Krapf D, Wu M Y, Smeets R M M, Zandbergen H W, Dekker C and Lemay S G 2006 Fabrication and characterization of nanopore-based electrodes with radii down to 2 nm Nano Lett. 6 105-9 (Pubitemid 43166110)
2. Zandbergen H W, van Duuren R, Alkemade P F A, Lientschnig G, Vasquez O, Dekker C and Tichelaar F D 2005 Sculpting nanoelectrodes with a transmission electron beam for electrical and geometrical characterization of nanoparticles Nano Lett. 5 549-53 (Pubitemid 40449733)
3. Dekker C 2007 Solid-state nanopores Nat. Nanotechnol. 2 209-15 (Pubitemid 46739810)
4. Bayley H and Cremer P S 2001 Stochastic sensors inspired by biology Nature 413 226-30 (Pubitemid 32867888)
5. Schmidt J 2005 Stochastic sensors J. Mater. Chem. 15 831-40 (Pubitemid 40343890)
6. Kasianowicz J J, Brandin E, Branton D and Deamer D W 1996 Characterization of individual polynucleotide molecules using a membrane channel Proc. Natl Acad. Sci. USA 93 13770-3 (Pubitemid 26424195)
7. Deamer D W and Branton D 2002 Characterization of nucleic acids by nanopore analysis Acc. Chem. Res. 35 817-25
8. Vercoutere W A, Winters-Hilt S, DeGuzman V S, Deamer D, Ridino S E, Rodgers J T, Olsen H E, Marziali A and Akeson M 2003 Discrimination among individual watson-crick base pairs at the termini of single DNA hairpin molecules Nucleic Acids Res. 31 1311-8 (Pubitemid 36284972)
9. Winters-Hilt S and Akeson M 2004 Nanopore cheminformatics DNA Cell Biol. 23 675-83 (Pubitemid 39473656)
10. Winters-Hilt S, Vercoutere W, DeGuzman V S, Deamer D, Akeson M and Haussler D 2003 Highly accurate classification of Watson-Crick basepairs on termini of single DNA molecules Biophys. J. 84 967-76 (Pubitemid 36133422)
11. Ashkenasy N, Sanchez-Quesada J, Bayley H and Ghadiri M R 2005 Recognizing a single base in an individual DNA strand: a step toward DNA sequencing in nanopores Angew. Chem. Int. Edn 44 1401-4 (Pubitemid 40343561)
12. Healy K, Schiedt B and Morrison A P 2007 Solid-state nanopore technologies for nanopore-based DNA analysis Nanomedicine 2 875-97
13. Rhee M and Burns M A 2007 Nanopore sequencing technology: nanopore preparations Trends Biotechnol. 25 174-81 (Pubitemid 46413368)
14. Buchholz K, Tinazli A, Kleefen A, Dorfner D, Pedone D, Rant U, Tampe R, Abstreiter G and Tornow M 2008 Silicon-on-insulator based nanopore cavity arrays for lipid membrane investigation Nanotechnology 19 445305
15. Storm A J, Chen J H, Ling X S, Zandbergen H W and Dekker C 2003 Fabrication of solid-state nanopores with single-nanometre precision Nat. Mater. 2 537-40
16. Li J, Stein D, McMullan C, Branton D, Aziz M J and Golovchenko J A 2001 Ion-beam sculpting at nanometre length scales Nature 412 166-9 (Pubitemid 32674708)
17. Zhang J, You L, Ye H and Yu D 2007 Fabrication of ultrafine nanostructures with single-nanometre precision in a high-resolution transmission electron microscope Nanotechnology 18 155303-8
18. Kim M J, Wanunu M, Bell D C and Meller A 2006 Rapid fabrication of uniformly sized nanopores and nanopore arrays for parallel DNA analysis Adv. Mater. 18 3149-53 (Pubitemid 46080209)
19. Kim M J, McNally B, Murata K and Meller A 2007 Characteristics of solid-state nanometre pores fabricated using a transmission electron microscope Nanotechnology 18 205302
20. 2 nanostructures J. Appl. Phys. 98 014307
21. 2 membrane with an electron beam Appl. Phys. Lett. 87 113106
22. Choi Y R, Rack P D, Frost B and Joy D C 2007 Effect of electron beam-induced deposition and etching under bias Scanning 29 171-6 (Pubitemid 47271885)
23. Randolph S J, Fowlkes J D and Rack P D 2005 Focused electron-beam-induced etching of silicon dioxide J. Appl. Phys. 98 034902
24. Randolph S J, Fowlkes J D and Rack P D 2006 Focused, nanoscale electron-beam-induced deposition and etching Crit. Rev. Solid State 31 55-89 (Pubitemid 44603985)
25. 2 etch selectivity and its application to oxide nano-aperture formation Microelectron. Eng. 83 2493-8 (Pubitemid 44810920)
26. Crozier P A 2007 Nanoscale oxide patterning with electron-solid-gas reactions Nano Lett. 7 2395-8 (Pubitemid 47310137)
27. 2 vapor Appl. Phys. Lett. 34 70-3
28. Toda R, Minami K and Esashi M 1998 Thin-beam bulk micromachining based on RIE and Xenon difluoride silicon etching Sensors Actuators A 66 268-72 (Pubitemid 128378841)