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Volumn 28, Issue 6, 2010, Pages 1206-1209

Electron beam induced etching of silicon with SF6

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRONS; ETCHING; SILICON; SULFUR HEXAFLUORIDE;

EID: 78650126124     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3504594     Document Type: Article
Times cited : (7)

References (13)
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  • 7
    • 34547993223 scopus 로고    scopus 로고
    • Effect of electron beam-induced deposition and etching under bias
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    • Choi, Y.R.1    Rack, P.D.2    Frost, B.3    Joy, D.C.4
  • 9
    • 56449117296 scopus 로고    scopus 로고
    • ASUSEE 0169-4332,. 10.1016/j.apsusc.2008.05.178
    • N. Vanhove, P. Lievens, and W. Vandervorst, Appl. Surf. Sci. ASUSEE 0169-4332 255, 1360 (2008). 10.1016/j.apsusc.2008.05.178
    • (2008) Appl. Surf. Sci. , vol.255 , pp. 1360
    • Vanhove, N.1    Lievens, P.2    Vandervorst, W.3
  • 10
    • 4243301501 scopus 로고
    • PRLTAO 0031-9007,. 10.1103/PhysRevLett.40.964
    • M. L. Knotek and P. J. Feibelman, Phys. Rev. Lett. PRLTAO 0031-9007 40, 964 (1978). 10.1103/PhysRevLett.40.964
    • (1978) Phys. Rev. Lett. , vol.40 , pp. 964
    • Knotek, M.L.1    Feibelman, P.J.2
  • 11
    • 26444434886 scopus 로고    scopus 로고
    • 4 multilayers adsorbed on Si(1 1 1)
    • DOI 10.1016/j.susc.2005.06.058, PII S0039602805007211, Proceedings of the Tenth International Workshop on Desorption Induced by Electronic Transitions
    • C. D. Lane, K. R. Shepperd, A. B. Aleksandrov, and T. M. Orlando, Surf. Sci. SUSCAS 0039-6028 593, 173 (2005). 10.1016/j.susc.2005.06.058 (Pubitemid 41430416)
    • (2005) Surface Science , vol.593 , Issue.1-3 , pp. 173-179
    • Lane, C.D.1    Shepperd, K.R.2    Aleksandrov, A.B.3    Orlando, T.M.4
  • 12
  • 13
    • 58149269450 scopus 로고    scopus 로고
    • NNOTER 0957-4484,. 10.1088/0957-4484/19/45/455306
    • M. G. Lassiter and P. D. Rack, Nanotechnology NNOTER 0957-4484 19, 455306 (2008). 10.1088/0957-4484/19/45/455306
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    • Lassiter, M.G.1    Rack, P.D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.