Nanofabrication of insulated scanning probes for electromechanical imaging in liquid solutions

Nanotechnology

Volumn 21, Issue 36, 2010, Pages

  Hyon Noh, Joo ^a   Nikiforov, Maxim ^b   Kalinin, Sergei V ^b   Vertegel, Alexey A ^c   Rack, Philip D ^a,b  

^a University of Tennessee   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c Clemson University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM TIP; CHROMIUM LAYER; CONDUCTIVE PATHS; ELECTRICAL MEASUREMENT; FABRICATION PROCESS; LIQUID ENVIRONMENT; LIQUID SOLUTION; NANOFABRICATION; PIEZORESPONSE FORCE MICROSCOPY; SCANNING PROBES; SILICON CANTILEVER; SILICON DIOXIDE; TIP APEX;

CHROMIUM; FABRICATION; LIQUIDS; SCANNING; SILICA;

PROBES;

EID: 77957855856     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/36/365302     Document Type: Article

References (36)

1. Macpherson J V and Unwin P R 2000 Combined scanning electrochemical- atomic force microscopy Anal. Chem. 72 276-85
2. Frederix P, Gullo M R, Akiyama T, Tonin A, de Rooij N F, Staufer U and Engel A 2005 Assessment of insulated conductive cantilevers for biology and electrochemistry Nanotechnology 16 997-1005
3. Zoski C G, Liu B and Bard A J 2004 Scanning electrochemical microscopy: theory and characterization of electrodes of finite conical geometry Anal. Chem. 76 3646-54
4. Drake B, Prater C B, Weisenhorn A L, Gould SAC, Albrecht T R, Quate C F, Cannell D S, Hansma H G and Hansma P K 1989 Imaging crystals, polymers, and processes in water with the atomic microscope Science 243 1586-9
5. Engel A and Muller D J 2000 Observing single biomolecules at work with the atomic force microscope Nat. Struct. Biol. 7715-8
6. Frederix P L T M, Bosshart P D, Akiyama T, Chami M, Gullo M R, Blackstock J J, Dooleweerdt K, de Rooij N F, Staufer U and Engel A 2008 Conductive supports for combined AFM-SECM on biological membranes Nanotechnology 19 384004
7. Bullard J W, Kershner R J and Cima M J 2004 Scanning probe characterization of localized pH changes on a sapphire surface in the presence of an applied field Mater. Res. Soc. Symp. Proc. 782 A3.1-6
8. Jang J W, Sanedrin R G, Maspoch D, Hwang S, Fujigaya T, Jeon Y M, Vega R A, Chen X D and Mirkin C A 2008 Electrically biased nanolithography with KOH-coated AFM tips Nano Lett. 8 1451-5
9. Muller D J and Engel A 1997 The height of biomolecules measured with the atomic force microscope depends on electrostatic interactions Biophys. J. 73 1633-44
10. Muller D J, Fotiadis D, Scheuring S, Muller S A and Engel A 1999 Electrostatically balanced subnanometer imaging of biological specimens by atomic force microscope Biophys. J. 76 1101-11
11. Rodriguez B J, Jesse S, Seal K, Baddorf A P, Kalinin S V and Rack P D 2007 Fabrication, dynamics, and electrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids Appl. Phys. Lett. 91 093130
12. Akiyama T, Gullo M R, de Rooij N F, Tonin A, Hidber H R, Frederix P, Engel A and Staufer U 2004 Development of insulated conductive probes with platinum silicide tips for atomic force microscopy in cell biology Japan. J. Appl. Phys. 43 3865-7
13. Wiedemair J, Balu B, Moon J S, Hess D W, Mizaikoff B and Kranz C 2008 Plasma-deposited fluorocarbon films: insulation material for microelectrodes and combined atomic force microscopy-scanning electrochemical microscopy probes Anal. Chem. 80 5260-5
14. Durig U, Gimzewski J K and Pohl D W 1986 Experimental-observation of forces acting during scanning tunneling microscopy Phys.Rev. Lett. 57 2403-6
15. Frederix P T, Hoogenboom B W, Fotiadis D, Muller D J and Engel A 2004 Atomic force microscopy of biological samples MRS Bull. 29 449-55
16. Lantz M A, O'Shea S J and Welland M E 1998 Characterization of tips for conducting atomic force microscopy in ultrahigh vacuum Rev. Sci. lustrum. 69 1757-64
17. Kueng A, Kranz C, Mizaikoff B, Lugstein A and Bertagnolli E 2003 Combined scanning electrochemical atomic force microscopy for tapping mode imaging Appl. Phys. Lett. 82 1592-4
18. Kranz C, Friedbacher G, Mizaikoff B, Lugstein A, Smoliner J and Bertagnolli E 2001 Integrating an ultramicroelectrode in an AFM cantilever: combined technology for enhanced information Aual. Chem. 73 2491-500
19. Lugstein A, Bertagnolli E, Kranz C, Kueng A and Mizaikoff B 2002 Integrating micro- and nanoelectrodes into atomic force microscopy cantilevers using focused ion beam techniques Appl. Phys. Lett. 81 349-51
20. Gullo M R, Frederix P L T M, Akiyama T, Engel A, deRooij N F and Staufer U 2006 Characterization of microfabricated probes for combined atomic force and high-resolution scanning electrochemical microscopy Aual. Chem. 78 5436-42
21. Misra A and Nastasi M 1999 Limits of residual stress in Cr films sputter deposited on biased substrates Appl. Phys. Lett. 75 3123-5
22. Thornton J A and Hoffman D W 1989 Stress-related effects in thin-films Thin Solid Films 171 5-31
23. Randolph S J, Fowlkes J D and Rack P D 2006 Focused, nanoscale electron-beam-induced deposition and etching Crit. Rev. Solid State Sci. 31 55-89
24. Randolph S J, Fowlkes J D and Rack P D 2005 Focused electron-beam-induced etching of silicon dioxide J. Appl. Phys. 98 034902
25. Lassiter M G and Rack P D 2008 Nanoscale electron beam induced etching: a continuum model that correlates the etch profile to the experimental parameters Nanotechnology 19 455306
26. Winters H F and Coburn J W 1979 Etching of silicon with XeF2 vapor Appl. Phys. Lett. 34 70-3
27. Guo Q, Li M, Li Y, Shi L, Chong T C, Kalb J A and Thompson C V 2008 Crystallization-induced stress in thin phase change films of different thicknesses Appl. Phys. Lett. 93 221907
28. Ohring M 1992 Materials Science of Thin Films (Boston, MA: Academic)
29. Stoney G G 1909 The tension of metallic films deposited by electrolysis Proc. R. Soc. A 82 172-5
30. Scanning Probe Image Processor (SPIP) Ver. 5.1.1 http://www. imagemet.com/
31. Seel S C, Thompson C V, Hearne S J and Floro J A 2000 Tensile stress evolution during deposition of Volmer-Weber thin films J. Appl. Phys. 88 7079-88
32. Tarraf A, Daleiden J, Irmer S, Prasai D and Hillmer H 2004 Stress investigation of PECVD dielectric layers for advanced optical MEMS J. Micromech. Microeng. 14 317-23
33. Kulkarni A K and Chang L C 1997 Electrical and structural characteristics of chromium thin films deposited on glass and alumina substrates Thin Solid Films 301 17-22
34. Balke N, Choudhury S, Jesse S, Huijben M, Chu Y H, Baddorf A P, Chen L Q, Ramesh R and Kalinin S V 2009 Deterministic control of ferroelastic switching in multiferroic materials Nat. Nanotechnol. 4 868-75
35. Bode M 2003 Spin-polarized scanning tunnelling microscopy Rep. Prog. Phys. 66 523-82
36. Rodriguez B J, Jesse S, Baddorf A P and Kalinin S V 2006 High resolution electromechanical imaging of ferroelectric materials in a liquid environment by piezoresponse force microscopy Phys. Rev. Lett. 96 4