SCOPUS 정보 검색 플랫폼

Volumn 44, Issue 3, 2012, Pages 365-371

Application of principal component analysis to a full profile correlative analysis of FTIR spectra

(7) Broderick, Scott R a Suh, Changwon a Provine, J b Roper, Christopher S c,d Maboudian, Roya c Howe, Roger T b Rajan, Krishna a

a Iowa State University (United States)

b Stanford University (United States)

c University of California (United States)

d Hughes Aircraft Co (United States)

Author keywords

infrared spectroscopy; materials informatics; polycrystalline silicon carbide films; principal component analysis; process control

Indexed keywords

CHEMICAL ANALYSIS; DATA HANDLING; EIGENVALUES AND EIGENFUNCTIONS; FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED SPECTROSCOPY; POLYCRYSTALLINE MATERIALS; POLYSILICON; PROCESS CONTROL; SILICON CARBIDE;

CORRELATIVE ANALYSIS; DATA ANALYSIS TOOL; EXPERIMENTAL PARAMETERS; FOURIER TRANSFORM INFRARED SPECTRA; GROWTH CONDITIONS; MATERIALS INFORMATICS; RELATIVE CONTRIBUTION; STRUCTURAL ELEMENTS;

PRINCIPAL COMPONENT ANALYSIS;

EID: 84857034285 PISSN: 01422421 EISSN: 10969918 Source Type: Journal
DOI: 10.1002/sia.3813 Document Type: Article

Times cited : (11)

References (35)

1
- 60349130423
- M. R. Keenan, Surf. Interf. Analys. 2009, 41, 79.
- (2009) Surf. Interf. Analys. , vol.41 , pp. 79
- Keenan, M.R.¹

2
- 60349094760
- V. S. Smentkowski, S. G. Ostrowski, M. R. Keenan, Surf. Interf. Analys. 2009, 41, 88.
- (2009) Surf. Interf. Analys. , vol.41 , pp. 88
- Smentkowski, V.S.¹ Ostrowski, S.G.² Keenan, M.R.³

3
- 60349106659
- J. Walton, N. Fairley, Surf. Interf. Analys. 2009, 41, 114.
- (2009) Surf. Interf. Analys. , vol.41 , pp. 114
- Walton, J.¹ Fairley, N.²

4
- 68349141979
- L. Gorlitz, B. H. Menze, B. M. Kelm, F. A. Hamprecht, Surf. Interf. Analys. 2009, 41, 636.
- (2009) Surf. Interf. Analys. , vol.41 , pp. 636
- Gorlitz, L.¹ Menze, B.H.² Kelm, B.M.³ Hamprecht, F.A.⁴

5
- 68349158038
- M. Dubey, K. Emoto, F. Cheng, L. J. Gamble, H. Takahashi, D. W. Grainger, D. G. Castner, Surf. Interf. Analys. 2009, 41, 645.
- (2009) Surf. Interf. Analys. , vol.41 , pp. 645
- Dubey, M.¹ Emoto, K.² Cheng, F.³ Gamble, L.J.⁴ Takahashi, H.⁵ Grainger, D.W.⁶ Castner, D.G.⁷

6
- 68349148677
- A. Henderson, J. S. Fletcher, J. C. Vickerman, Surf. Interf. Analys. 2009, 41, 666.
- (2009) Surf. Interf. Analys. , vol.41 , pp. 666
- Henderson, A.¹ Fletcher, J.S.² Vickerman, J.C.³

7
- 18844459488
- In, W. J. Choyke, H. Matsunami, G. Pensl (eds), Springer, Berlin.
- C. A. Zorman, M. Mehregany, In Silicon Carbide-Recent Major Advances, W. J. Choyke, H. Matsunami, G. Pensl, (eds), Springer, Berlin, 2004.
- (2004) Silicon Carbide-Recent Major Advances
- Zorman, C.A.¹ Mehregany, M.²

8
- 3142711483
- D. Gao, M. B. J. Wijesundara, C. Carraro, R. T. Howe, R. Maboudian, Sensors J. IEEE. 2004, 4, 441.
- (2004) Sensors J. IEEE , vol.4 , pp. 441
- Gao, D.¹ Wijesundara, M.B.J.² Carraro, C.³ Howe, R.T.⁴ Maboudian, R.⁵

9
- 10944242629
- D. Gao, C. Carraro, V. Radmilovic, R. T. Howe, R. Maboudian, J. Microelectromech. Sys. 2004, 13, 972.
- (2004) J. Microelectromech. Sys. , vol.13 , pp. 972
- Gao, D.¹ Carraro, C.² Radmilovic, V.³ Howe, R.T.⁴ Maboudian, R.⁵

10
- 17244381858
- X.-A. Fu, J. Dunning, S. Rajgopal, M. Zhang, Mat. Res. Soc. Symp. Proc. 2004, 795 U11.3.1.
- (2004) Mat. Res. Soc. Symp. Proc , vol.795
- Fu, X.-A.¹ Dunning, J.² Rajgopal, S.³ Zhang, M.⁴

11
- 84857029781
- 529.
- X.-A. Fu, J. Trevino, M. Mehregany, C. Zorman, Mat. Sci. Forum. 2006, 311 527-529.
- (2006) Mat. Sci. Forum. , vol.311 , pp. 527
- Fu, X.-A.¹ Trevino, J.² Mehregany, M.³ Zorman, C.⁴

12
- 33846113316
- C. S. Roper, R. T. Howe, R. Maboudian, J. Micromech. Microeng. 2006, 16, 2736.
- (2006) J. Micromech. Microeng. , vol.16 , pp. 2736
- Roper, C.S.¹ Howe, R.T.² Maboudian, R.³

13
- 43049113904
- C. S. Roper, V. Radmilovic, R. T. Howe, R. Maboudian, J. Appl. Phy. 2008, 103, 084907.
- (2008) J. Appl. Phy. , vol.103 , pp. 084907
- Roper, C.S.¹ Radmilovic, V.² Howe, R.T.³ Maboudian, R.⁴

14
- 39349107860
- C. S. Roper, V. Radmilovic, R. T. Howe, R. Maboudian, Electrochem Solid State Lett. 2008, 11, D35.
- (2008) Electrochem Solid State Lett. , vol.11
- Roper, C.S.¹ Radmilovic, V.² Howe, R.T.³ Maboudian, R.⁴

15
- 0036850896
- M. B. J. Wijesundara, C. R. Stoldt, C. Carraro, R. T. Howe, R. Maboudian, Thin Solid Films. 2002, 419, 69.
- (2002) Thin Solid Films. , vol.419 , pp. 69
- Wijesundara, M.B.J.¹ Stoldt, C.R.² Carraro, C.³ Howe, R.T.⁴ Maboudian, R.⁵

16
- 0141964094
- M. B. J. Wijesundara, D. Gao, C. Carraro, R. T. Howe, R. Maboudian, J. Cryst. Growth. 2003, 259, 18.
- (2003) J. Cryst. Growth. , vol.259 , pp. 18
- Wijesundara, M.B.J.¹ Gao, D.² Carraro, C.³ Howe, R.T.⁴ Maboudian, R.⁵

17
- 34548580490
- H. Högström, S. Valizadeh, C. G. Ribbing, Opt. Mat. 2007, 30, 328.
- (2007) Opt. Mat. , vol.30 , pp. 328
- Högström, H.¹ Valizadeh, S.² Ribbing, C.G.³

18
- 48049096559
- J. Provine, P. B. Catrysse, C. Roper, R. Maboudian, S. Fan, R. T. Howe, IEEE/LEOS Int. Conf. Opt. MEMS Nanophotonics. 2007, 157.
- (2007) IEEE/LEOS Int. Conf. Opt. MEMS Nanophotonics. , pp. 157
- Provine, J.¹ Catrysse, P.B.² Roper, C.³ Maboudian, R.⁴ Fan, S.⁵ Howe, R.T.⁶

19
- 33847257766
- P. B. Catrysse, S. Fan, Phys. Rev. B. 2007, 75, 075422.
- (2007) Phys. Rev. B. , vol.75 , pp. 075422
- Catrysse, P.B.¹ Fan, S.²

20
- 77949382919
- S. R. Broderick, J. R. Nowers, B. Narasimahn, K. Rajan, J. Comb. Chem. 2010, 12, 270.
- (2010) J. Comb. Chem. , vol.12 , pp. 270
- Broderick, S.R.¹ Nowers, J.R.² Narasimahn, B.³ Rajan, K.⁴

21
- 84889282199
- In, M. D. Porter, B. Narasimhan, S. K. Mallapragada (eds), John Wiley & Sons, Hoboken, 119.
- C. Suh, K. Rajan, B. M. Vogel, B. Narasimhan, S. K. Mallapragada, In Combinatorial Materials Science, M. D. Porter, B. Narasimhan, S. K. Mallapragada, (eds), John Wiley & Sons, Hoboken, 2007, pp. 109-119.
- (2007) Combinatorial Materials Science , pp. 109
- Suh, C.¹ Rajan, K.² Vogel, B.M.³ Narasimhan, B.⁴ Mallapragada, S.K.⁵

22
- 77949360947
- S. R. Broderick, H. Aourag, K. Rajan, Stat. Anal. Data Min. 2009, 6, 353.
- (2009) Stat. Anal. Data Min. , vol.6 , pp. 353
- Broderick, S.R.¹ Aourag, H.² Rajan, K.³

23
- 0003401014
- John Wiley & Sons, New York.
- J. C. Davis, Statistics and Data Analysis in Geology, John Wiley & Sons, New York, 1986.
- (1986) Statistics and Data Analysis in Geology
- Davis, J.C.¹

24
- 0003946510
- Springer-Verlag, New York.
- I. T. Jolliffe, Principal Component Analysis, Springer-Verlag, New York, 2002.
- (2002) Principal Component Analysis
- Jolliffe, I.T.¹

25
- 0003826721
- Umetrics Academy, UmeÃ
- L. Eriksson, E. Johansson, N. Kettaneh-Wold, S. Wold, Multi- and Megavariate Data Analysis-Principles and Applications, Umetrics Academy, UmeÃ¥, 1999.
- (1999) Multi- And Megavariate Data Analysis - Principles and Applications
- Eriksson, L.¹ Johansson, E.² Kettaneh-Wold, N.³ Wold, S.⁴

26
- 0038010649
- F. Yan, Opt. Mat. 2003, 23, 113.
- (2003) Opt. Mat. , vol.23 , pp. 113
- Yan, F.¹

27
- 0037216985
- Y. Wang, H. He, Y. Cao, H. Tang, Mat. Lett. 2003, 57, 1179.
- (2003) Mat. Lett. , vol.57 , pp. 1179
- Wang, Y.¹ He, H.² Cao, Y.³ Tang, H.⁴

28
- 34248680470
- X. W. Du, Y. Fu, J. Sun, P. Yao, L. Cui, Mat. Chem. Phys. 2007, 103, 456.
- (2007) Mat. Chem. Phys. , vol.103 , pp. 456
- Du, X.W.¹ Fu, Y.² Sun, J.³ Yao, P.⁴ Cui, L.⁵

29
- 0033690662
- K. B. Sundaram, J. Alizadeh, Thin Solid Films. 2000, 370, 151.
- (2000) Thin Solid Films. , vol.370 , pp. 151
- Sundaram, K.B.¹ Alizadeh, J.²

30
- 17644391049
- I. V. Afanasyev-Charkin, M. Nastasi, Surf. Coat. Tech. 2004, 186, 108.
- (2004) Surf. Coat. Tech. , vol.186 , pp. 108
- Afanasyev-Charkin, I.V.¹ Nastasi, M.²

31
- 44649161235
- M. Zielinski, M. Portail, T. Chassagne, S. Juillaguet, H. Peyre, J. Cryst. Growth. 2008, 310, 3174.
- (2008) J. Cryst. Growth. , vol.310 , pp. 3174
- Zielinski, M.¹ Portail, M.² Chassagne, T.³ Juillaguet, S.⁴ Peyre, H.⁵

32
- 0015079124
- J. A. Borders, S. T. Picraux, W. Beezhold, Appl. Phys. Lett. 1971, 18, 509.
- (1971) Appl. Phys. Lett. , vol.18 , pp. 509
- Borders, J.A.¹ Picraux, S.T.² Beezhold, W.³

33
- 33751173751
- W. G. Spitzer, D. Kleinman, D. Walsh, Phys. Rev. 1959, 113, 127.
- (1959) Phys. Rev. , vol.113 , pp. 127
- Spitzer, W.G.¹ Kleinman, D.² Walsh, D.³

34
- 0003764322
- Elsevier, Amsterdam.
- D. L. Massart, B. G. M. Vandeginste, S. N. Deming, Y. Michotte, L. Kaufman, Chemometrics: A Textbook, Elsevier, Amsterdam, 1988.
- (1988) Chemometrics: A Textbook
- Massart, D.L.¹ Vandeginste, B.G.M.² Deming, S.N.³ Michotte, Y.⁴ Kaufman, L.⁵

35
- 56749155960
- C. S. Roper, V. Radmilovic, R. T. Howe, R. Maboudian, J. Electrochem. Soc. 2009, 156, D5.
- (2009) J. Electrochem. Soc. , vol.156
- Roper, C.S.¹ Radmilovic, V.² Howe, R.T.³ Maboudian, R.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.