Growth of crystalline SiC film free of cavities by heating PS/silica sol-gel coatings on Si (111) substrate

Materials Letters

Volumn 57, Issue 5-6, 2003, Pages 1179-1183

  Wang, Yuxia ^a   He, Haiping ^a   Cao, Ying ^a   Tang, Honggao ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Cavity; SEM; Silicon carbide; Sol gel preparation; Thin films

Indexed keywords

CRYSTAL GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; POLYSTYRENES; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SINGLE CRYSTALS; SOL-GELS; SPIN COATING; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

INTERFACE CAVITIES;

THIN FILMS;

EID: 0037216985     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(02)00952-7     Document Type: Conference Paper

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