Particle agglomeration study in in silane plasmas: In situ study by polarization-sensitive laser light scattering

Journal of Applied Physics

Volumn 80, Issue 4, 1996, Pages 2069-2078

  Courteille, C ^a   Hollenstein, Ch ^a   Dorier, J L ^a   Gay, P ^a   Schwarzenbach, W ^a   Howling, A A ^a   Bertran, E ^b   Viera, G ^b   Martins, R ^c   Macarico, A ^c  

^a EPFL   (Switzerland)

^b UNIVERSITY OF BARCELONA   (Spain)

^c UNIVERSIDADE NOVA DE LISBOA   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001314405     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363118     Document Type: Article

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