Quantitative scanning capacitance spectroscopy

Applied Physics Letters

Volumn 83, Issue 20, 2003, Pages 4253-4255

  Brezna, W ^a   Schramboeck, M ^a   Lugstein, A ^a   Harasek, S ^a   Enichlmair, H ^a,b   Bertagnolli, E ^a   Gornik, E ^a   Smoliner, J ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b AMS AG   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COAXIAL CABLES; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; INTERFACES (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSCOPES; MOS CAPACITORS; SILICA; SILICON WAFERS; SPECTROSCOPY; ZIRCONIA;

SCANNING CAPACITANCE MICROSCOPY; SCANNING CAPACITANCE SPECTROSCOPY;

CAPACITANCE MEASUREMENT;

EID: 0346150136     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1628402     Document Type: Article

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