Computer simulation of ion beam analysis: Possibilities and limitations

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 269, Issue 24, 2011, Pages 3006-3013

  Mayer, M ^a   Eckstein, W ^a   Langhuth, H ^a   Schiettekatte, F ^b   Von Toussaint, U ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b UNIVERSITÉ DE MONTRÉAL   (Canada)

Author keywords

Computer software; Data analysis; Ion beam analysis; Simulation

Indexed keywords

COMPLEX SAMPLES; COMPUTER SIMULATION CODES; COMPUTING TIME; CROSS SECTION DATA; DEPTH PROFILE; ELASTIC RECOIL DETECTION ANALYSIS; ELEMENTAL CONCENTRATIONS; INPUT DATAS; ION BEAM ANALYSIS; NUCLEAR REACTION ANALYSIS; SIMULATION; STOPPING POWER;

CODES (SYMBOLS); COMPUTATIONAL METHODS; COMPUTER SOFTWARE; DATA REDUCTION; ION BEAMS; IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

COMPUTER SIMULATION;

EID: 81855185545     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2011.04.066     Document Type: Conference Paper

References (75)

1. E. Rauhala, N.P. Barradas, S. Fazinic, M. Mayer, E. Szilágyi, and M. Thompson Nucl. Instr. Meth. B 244 2006 436
2. N.P. Barradas, E. Rauhala, Data analysis software for ion beam analysis, in: Wang and Nastasi [75] (Chapter 14).
3. N.P. Barradas, K. Arstila, G. Battistig, M. Bianconi, N. Dytlewski, C. Jeynes, E. Kótai, G. Lulli, M. Mayer, E. Rauhala, E. Szilágyi, and M. Thompson Nucl. Instr. Meth. B 262 2007 281
4. N.P. Barradas, K. Arstila, G. Battistig, M. Bianconi, N. Dytlewski, C. Jeynes, E. Kótai, G. Lulli, M. Mayer, E. Rauhala, E. Szilágyi, and M. Thompson Nucl. Instr. Meth. B 266 2008 1338
5. B.M.U. Scherzer, H.L. Bay, R. Behrisch, P. Børgesen, and J. Roth Nucl. Instr. Meth. 157 1978 75
6. P. Børgesen, R. Behrisch, and B.M.U. Scherzer Appl. Phys. A 111 1982 717
7. A. Bergmaier, G. Dollinger, and C.M. Frey Nucl. Instr. Meth. B 99 1995 488
8. J.L. Campbell, Particle-induced X-ray emission: PIXE, in: Wang and Nastasi [75] (Chapter 11).
9. M.L. Swanson, L. Shao, Ion channeling, in: Wang and Nastasi [75] (Chapter 12).
10. H. Paul, .
11. J.F. Ziegler, SRIM: The stopping and range of ions in matter, .
12. J.F. Ziegler Nucl. Instr. Meth. B 219-220 2004 1027
13. W.H. Bragg, and R. Kleeman Philos. Mag. 10 1905 318
14. P. Sigmund Particle Penetration and Radiation Effects, vol. 151 of Springer Series in Solid State Sciences 2006 Springer Berlin, Heidelberg
15. E. Szilágyi, F. Pászti, and G. Amsel Nucl. Instr. Meth. B 100 1995 103
16. N.P. Barradas, R.P. Pezzi, and I.J.R. Baumvol Nucl. Instr. Meth. B 261 2007 422
17. M. Mayer, K. Arstila, and U. von Toussaint Nucl. Instr. Meth. B 268 2010 1744
18. M. Bozoian Actual coulomb barriers J. Tesmer, M. Nastasi, Handbook of Modern Ion Beam Materials Analysis first ed. 1995 Materials Research Society Pittsburgh, PA
19. A.F. Gurbich Nucl. Instr. Meth. B 217 2004 183
20. Ion Beam Analysis Nuclear Data Library (IBANDL), .
21. A. Gurbich, I. Bogdanovic-Radovic, M. Chiari, C. Jeynes, M. Kokkoris, A.R. Ramos, M. Mayer, E. Rauhala, O. Schwerer, Shi Liqun, and I. Vickridge Nucl. Instr. Meth. B 266 2008 1198
22. A. Gurbich Nucl. Instr. Meth. B 268 2010 1703
23. D. Abriola, A.F. Gurbich, N.P. Barradas, I. Bogdanovic-Radovic, M. Chiari, C. Jeynes, M. Kokkoris, M. Mayer, A.R. Ramos, L. Shi, and I. Vickridge Nucl. Instr. Meth. B 2011 10.1016/j.nimb.2011.04.056 these proceedings
24. I. Vickridge Nucl. Instr. Meth. B 66 1992 303
25. E. Markina, M. Mayer, and H.T. Lee Nucl. Instr. Meth. B 2011 10.1016/j.nimb.2011.04.075 these proceedings
26. J. L'Ecuyer, J.A. Davies, and N. Matsunami Nucl. Instr. Meth. 160 1979 337
27. H.H. Andersen, F. Besenbacher, P. Loftager, and W. Möller Phys. Rev. A21 6 1980 1891
28. J.F. Ziegler, J.P. Biersack, and U. Littmark The Stopping and Range of Ions in Solids, vol. 1 of The Stopping and Ranges of Ions in Matter 1985 Pergamon Press New York
29. W.D. Wilson, L.G. Haggmark, and J.P. Biersack Phys. Rev. B15 1977 2458
30. H.G. Schlager, W. Eckstein, The scattering integrals - integration and accuracy, Tech. Rep. IPP 9/69, Max-Planck-Institut für Plasmaphysik, Garching, 1991.
31. J.P. Biersack, and L.G. Haggmark Nucl. Instr. Meth. 174 1980 257
32. J.P. Biersack, and W. Eckstein Appl. Phys. A34 1984 73
33. W. Eckstein, R. Dohmen, A. Mutzke, and R. Schneider SDTrimSP: A Monte-Carlo code for calculating collision phenomena in randomized targets Tech. Rep. IPP 12/3 2007 Max-Planck-Institut für Plasmaphysik Garching
34. L. Nowicki, A. Turos, R. Ratajczak, A. Stonert, and F. Garrido Nucl. Instr. Meth. B 240 2005 277
35. A. Turos, L. Nowicki, A. Stonert, K. Pagowska, J. Jagielski, and A. Muecklich Nucl. Instr. Meth. B 268 2010 1718
36. R.D. Franich, P.N. Johnston, I.F. Bubb, N. Dytlewski, and D.D. Cohen Nucl. Instr. Meth. B 190 2002 252
37. R.D. Franich, P.N. Johnston, and I.F. Bubb Nucl. Instr. Meth. B 219-220 2004 87
38. K. Arstila, T. Sajavaara, and J. Keinonen Nucl. Instr. Meth. B 174 2001 163
39. K. Arstila, J.A. Knapp, K. Nordlund, and B.L. Doyle Nucl. Instr. Meth. B 219-220 2004 1058
40. B. Yuan, P.C. Yu, and S.M. Tang Nucl. Instr. Meth. B 83 1993 413
41. Franois Schiettekatte, Nucl. Instr. Meth. B 266 (2008) 1880.
42. M. Mayer SIMNRA User's Guide Tech. Rep. IPP 9/113 1997 Max-Planck-Institut für Plasmaphysik Garching
43. M. Mayer, SIMNRA, a simulation program for the analysis of NRA, RBS and ERDA, in: J.L. Duggan, I. Morgan (Eds.), Proceedings of the 15th International Conference on the Application of Accelerators in Research and Industry, vol. 475 of AIP Conference Proceedings, American Institute of Physics, Woodbury, New York, 1999, p. 541.
44. R. Doolittle Nucl. Instr. Meth. B 9 1985 344
45. R. Doolittle Nucl. Instr. Meth. B 15 1986 227
46. C. Jeynes, N.P. Barradas, P.K. Marriott, G. Boudreault, M. Jenkin, E. Wendler, and R.P. Webb J. Phys. D: Appl. Phys. 36 2003 R97
47. E. Szilágyi Nucl. Instr. Meth. B 161-163 2000 37
48. G. Amsel, G. Battistig, and A. L'Hoir Nucl. Instr. Meth. B 201 2003 325
49. G. Amsel, G. Battistig, and A. L'Hoir Nucl. Instr. Meth. B 219-220 2004 1037
50. M. Mayer, K. Arstila, K. Nordlund, E. Edelmann, and J. Keinonen Nucl. Instr. Meth. B 249 2006 823
51. A. Weber, H. Mommsen, W. Sarter, and A. Weller Nucl. Instr. Meth. 198 1982 527
52. A. Weber, and H. Mommsen Nucl. Instr. Meth. 204 1983 559
53. E. Steinbauer, P. Bauer, and J.P. Biersack Nucl. Instr. Meth. B 45 1990 171
54. W. Eckstein, and M. Mayer Nucl. Instr. Meth. B 153 1999 337
55. M.J.F. Healy, M. Torres, and J.D. Painter Nucl. Instr. Meth. B 249 2006 789
56. J.L. Colaux, Simtarget, .
57. N.P. Barradas J. Phys. D: Appl. Phys. 34 2001 2109
58. M. Mayer Nucl. Instr. Meth. B 194 2002 177
59. N.P. Barradas, E. Alves, S. Pereira, V.V. Shvartsman, A.L. Kholkin, E. Pereira, K.P. O'Donnell, C. Liu, C.J. Deatcher, I.M. Watson, and M. Mayer Nucl. Instr. Meth. B 217 2004 479
60. M. Mayer, R. Fischer, S. Lindig, U. von Toussaint, R.W. Stark, and V. Dose Nucl. Instr. Meth. B 228 2005 349
61. M. Mayer, J. Likonen, J.P. Coad, H. Maier, M. Balden, S. Lindig, E. Vainonen-Ahlgren, V. Philipps JET-EFDA Contributors J. Nucl. Mater. 363-365 2007 101
62. M. Mayer, V. Rohde, G. Ramos, E. Vainonen-Ahlgren, J. Likonen, J.L. Chen ASDEX upgrade team Physica Scripta T128 2007 106
63. J.P. Stoquert, and T. Szörényi Phys. Rev. B66 2002 144108
64. I. Bizyukov, A. Mutzke, R. Schneider, and J. Davis Nucl. Instr. Meth. B 268 2010 2631
65. S.L. Molodtsov, A.F. Gurbich, and C. Jeynes J. Phys. D 41 2008 205303
66. I.M. Yesil, W. Assmann, H. Huber, and K.E.G. Löbner Nucl. Instr. Meth. B 136-138 1998 623
67. M. Mayer, J. Roth, and K. Ertl Nucl. Instr. Meth. B 190 2002 405
68. P. Rao, S. Kumar, G.L.N. Reddy, S. Veena, S. Kalavathi, J.V. Ramana, and V.S. Raju Nucl. Instr. Meth. B 268 2010 3395
69. J.R. Bird, P. Duerden, D.D. Cohen, G.B. Smith, and P. Hillery Nucl. Instr. Meth. 218 1983 53
70. M. Mayer Nucl. Instr. Meth. B 266 2008 1852
71. N.P. Barradas Nucl. Instr. Meth. B 190 2004 247
72. M. Mayer, E. Gauthier, K. Sugiyama, and U. von Toussaint Nucl. Instr. Meth. B 267 2009 506
73. C. Jeynes, N.P. Barradas, Pitfalls in ion beam analysis, in: Wang and Nastasi [75] (Chapter 15).
74. U. von Toussaint, T. Schwarz-Selinger, M. Mayer, and S. Gori Nucl. Instr. Meth. B 268 2010 2115
75. Y. Wang, and M. Nastasi Handbook of Modern Ion Beam Materials Analysis second ed. 2009 Materials Research Society Warrendale, PA