Bayesian reconstruction of surface roughness and depth profiles

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 228, Issue 1-4 SPEC. ISS., 2005, Pages 349-359

  Mayer, M ^a   Fischer, R ^a   Lindig, S ^a   Von Toussaint, U ^a   Stark, R W ^b   Dose, V ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

Author keywords

Deconvolution; Depth profiling; Inverse problem; Rutherford backscattering; Surface roughness

Indexed keywords

DECONVOLUTION; DEPTH PROFILING; INVERSE PROBLEM; RUTHERFORD BACKSCATTERING;

BACKSCATTERING; COMPUTER SIMULATION; DATA REDUCTION; DETECTORS; ION BEAMS; PARAMETER ESTIMATION; PROBABILITY; PROBLEM SOLVING;

SURFACE ROUGHNESS;

EID: 11444263504     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.10.069     Document Type: Conference Paper

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