Paradoxical features of small angle multiple scattering in matter and their implications in depth profiling with IBA

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 1037-1042

  Amsel, G ^a   Battistig, G ^b   L'Hoir, A ^a  

^a UNIVERSITÉ PARIS DESCARTES   (France)

^b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Angular distribution; Ion beam analysis; Lateral spread; Multiple scattering

Indexed keywords

ALGEBRA; ENERGY DISSIPATION; ENERGY TRANSFER; FOURIER TRANSFORMS; PROBABILITY; RANDOM PROCESSES; STATISTICAL METHODS;

ANGULAR DISTRIBUTION; ION BEAM ANALYSIS; LATERAL SPREAD; MULTIPLE SCATTERING;

ION BOMBARDMENT;

EID: 2342567019     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.209     Document Type: Conference Paper

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