A software tool enabling the analysis of small lateral features without the use of a micro-beam

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 789-791

  Healy, M J F ^a   Torres, M ^a   Painter, J D ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Inhomogeneous; Lateral; Microbeam; Simulation; Structures

Indexed keywords

COMPOSITION; COMPUTER SIMULATION; ELECTRON MICROSCOPY; EMBEDDED SYSTEMS; ION BEAMS; MATHEMATICAL MODELS; MICROELECTRONICS; SILICA; WSI CIRCUITS;

INHOMOGENEOUS; LATERAL; MICROBEAMS; STRUCTURES;

COMPUTER AIDED SOFTWARE ENGINEERING;

EID: 33745805880     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.03.140     Document Type: Article

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