Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardment: Experiment and modeling

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 17-18, 2010, Pages 2631-2638

  Bizyukov, Ivan ^a,d   Mutzke, Andreas ^b   Schneider, Ralf ^c   Davis, James ^d  

^a V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^c UNIVERSITY OF GREIFSWALD   (Germany)

^d UNIVERSITY OF TORONTO   (Canada)

Author keywords

Local ion surface interactions; Redeposition; SDTrimSP 2D; Sputtering; Surface morphology

Indexed keywords

2-D SYSTEMS; 2D CODES; ARGON ION; EXPERIMENTAL MEASUREMENTS; ION SURFACE INTERACTIONS; MATERIAL TRANSPORT; NANO SCALE; NORMAL INCIDENCE; PITCH GRATING; REDEPOSITION; SDTRIMSP-2D; SEM; STRUCTURED SURFACES; SURFACE PROFILES;

ARGON; BIOLOGY; ION BOMBARDMENT; IONS; MORPHOLOGY; SURFACES; TWO DIMENSIONAL;

SURFACE MORPHOLOGY;

EID: 77955509510     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.06.035     Document Type: Article

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