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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 194, Issue 2, 2002, Pages 177-186

Ion beam analysis of rough thin films

(1) Mayer, Matej a

a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ION BEAMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); NUCLEAR REACTION ANALYSIS (NRA);

NUCLEAR PHYSICS;

EID: 0036679848 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(02)00689-4 Document Type: Article

Times cited : (186)

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