Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches

Sensors and Actuators, A: Physical

Volumn 169, Issue 1, 2011, Pages 242-249

  Martinez Crespiera S ^a   Ionescu, E ^a   Schlosser, M ^a   Flittner, K ^a   Mistura, G ^b   Riedel, R ^a   Schlaak, H F ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

Microcomponents; Photolithography; Polymer derived ceramics; SiOC; Soft lithography

Indexed keywords

CERAMIC MICROSTRUCTURES; COMPLEX SHAPED CERAMICS; MICRO PART; MICRO STRUCTURING; MICRO-COMPONENTS; MICRO-TRANSFER MOLDING; PHOTOCROSS-LINKING; POLYMER DERIVED CERAMICS; PRECERAMIC POLYMER; REPLICA MOLDING; SI WAFER; SIOC; SOFT LITHOGRAPHY APPROACHES; SOFT-LITHOGRAPHY;

ASPECT RATIO; CERAMIC MATERIALS; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SILICONES;

MOLDING;

EID: 80955178271     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.04.041     Document Type: Article

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