Amorphous Si(Al)OC ceramic from polysiloxanes: Bulk ceramic processing, crystallization behavior and applications

Journal of the European Ceramic Society

Volumn 24, Issue 12, 2004, Pages 3471-3482

  Harshe, Rahul ^a   Balan, Corneliu ^b   Riedel, Ralf ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

MEMS; Mullite SiC; Precursors organic; Si(Al)OC; Siloxanes; Thermal stability

Indexed keywords

CATALYSTS; CERAMIC MATERIALS; COMPOSITION; CROSSLINKING; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; DENSIFICATION; HEAT TREATMENT; MATRIX ALGEBRA; PHASE SEPARATION; PYROLYSIS; REACTION KINETICS; SINTERING; SOL-GELS;

BULK CERAMIC PROCESSING; MICRO CRACKING; MICRO ELECTRO MECHANICAL SYSTEM (MEMS); NANOCRYSTALS; POLYMER REACTION SYNTHESIS;

SILICONES;

CERAMICS; CRYSTALLIZATION; INDUSTRIAL APPLICATION; PROCESSING TECHNIQUE; THERMAL ANALYSIS;

EID: 2042536706     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2003.10.016     Document Type: Article

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