Processing and characterization of silicon carbon-nitride ceramics: Application of electrical properties towards MEMS thermal actuators

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 171-181

  Liew, Li Anne ^a   Saravanan, R A ^a   Bright, Victor M ^a   Dunn, Martin L ^a   Daily, John W ^a   Raj, Rishi ^a  

^a UCB 450   (United States)

Author keywords

Ceramic; Electrical properties; Fabrication; MEMS; Polymer

Indexed keywords

ACTUATORS; CARBON NITRIDE; ELECTRIC CONDUCTIVITY; FABRICATION; MICROELECTROMECHANICAL DEVICES; SILICON;

POLYMER-DERIVED CERAMICS (PDC);

CERAMIC MATERIALS;

EID: 0037438776     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00330-8     Document Type: Conference Paper

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