SCOPUS 정보 검색 플랫폼

Volumn 19, Issue 4, 2007, Pages 321-326

Micromoulding of lead zirconate titanate (PZT) structures for MEMS

Author keywords

Ceramics; MEMS; Micromoulding; PZT

Indexed keywords

ASPECT RATIO; CERAMIC MATERIALS; FABRICATION; THICK FILMS;

CERAMIC POWDERS; CERAMIC STRUCTURES; LEAD ZIRCONATE TITANATE STRUCTURES; MICROMOULDING; PHOTORESIST MATERIALS; POLYMERIC MOULDS;

MEMS;

EID: 37249061737 PISSN: 13853449 EISSN: 15738663 Source Type: Journal
DOI: 10.1007/s10832-007-9170-y Document Type: Article

Times cited : (11)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.