Stress and cracks in gel-derived ceramic coatings and thick film formation

Journal of Sol-Gel Science and Technology

Volumn 26, Issue 1-3, 2003, Pages 681-686

  Kozuka, Hiromitsu ^a   Takenaka, Shinsuke ^a   Tokita, Hiroshi ^a   Hirano, Toshihiro ^a   Higashi, Yugo ^a   Hamatani, Takao ^a  

^a KANSAI UNIVERSITY   (Japan)

Author keywords

BaTiO3; Coating films; PZT; Stress, crack

Indexed keywords

CHELATION; CRACKS; FUSED SILICA; GELS; HEAT TREATMENT; ORGANIC POLYMERS; RESIDUAL STRESSES; SILICA; SILICON WAFERS; THICK FILMS; TITANIUM COMPOUNDS;

CHELATING AGENTS;

CERAMIC COATINGS;

EID: 0037265299     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1020773415962     Document Type: Conference Paper

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