Ceramic microstructures and potential applications

Microsystem Technologies

Volumn 2, Issue 3, 1996, Pages 135-138

  Knitter, R ^a   Gunther E ^a   Odemer, C ^a   Maciejewski, U ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000770712     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050030     Document Type: Article

References (10)

1. Bast, U.; Cramer, D.; Wolff, A. (1991) A New Technique for the Production of Piezoelectric Composites with 1-3 Connectivity. In: Vincenzini, P. (ed.) Ceramics Today - Tomorrow's Ceramics, pp. 2005-2015. Elsevier Science Publishers B. V.
2. Bier, W.; Linder, G.; Seidel, D.; Schubert, K. (1991) Mechanische Mikrofertigung, KfK-Nachrichten 23, 165-173
3. Bier, W.; Keller, W.; Linder, G.; Seidel, D.; Schubert, K.; Martin, H. (1993) Gas-to-Gas Heat Transfer in Micro Heat exchangers. Chemical Engineering and Processing, Vol. 32, No. 1, 33-43
4. Bley, P.; Menz, W. (1991) Stand und Entwicklungsziele des LIGA-Verfahrens zur Herstellung von MikroStrukturen, KfK-Nachrichten 23, 69-75
5. Günther, E.; Maciejewski, U. (1994) Thermal Two-Stage Process for Preparation of Doped LZT Ceramic Powder from Heterometallic Organocomplex Compounds. 8th Cimtec, Florence, 28.6-4.7.94
6. Hirata, Y.; Okuyama, H.; Ogino, S.: Numazawa, T.; Takada, H. (1995) Piezoelectric Composites for Micro-ultrasonic Transducers Realized with Deep-etch X-ray Lithography. Proc. MEMS 1995 IEEE, 191-196
7. Knitter, R.; Günther, E.; Maciejewski, U.; Odemer, C. (1994) Preparation of Ceramic Microstructures. cfi/Ber. DKG 71, No. 9, 549-556
8. Knitter, R.; Odemer, C. (1994) Foliengießen und Prägen als Verfahren zur Herstellung keramischer Mikrostrukturen. KfK-Nachr. 4/94, 240-245
9. Lubitz, K.; Wolff, A.; Preu, G. (1993) Microstructuring Technology. Proc. 1993 IEEE Ultrason. Symp., 515-524
10. Williams, J.C. (1976) Doctor-Blade-Process, in: Wang, F.F.Y. (ed.) Treatise on Materials Science and Technology, Vol. 9, pp. 73-198. Academic Press, New York