Formation of complex ceramic miniaturized structures by pyrolysis of poly(vinylsilazane)

Journal of the American Ceramic Society

Volumn 79, Issue 6, 1996, Pages 1457-1465

  Freimuth, Herbert ^a   Hessel, Volker ^a   Kölle, Harald ^a   Lacher, Manfred ^a   Ehrfeld, Wolfgang ^a   Vaahs, Tilo ^b   Brück, Martin ^b  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

^b SANOFI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; MOLDING; PLASTICS CASTING; POLYMETHYL METHACRYLATES; POLYSILANES; POLYTETRAFLUOROETHYLENES; PYROLYSIS; STRUCTURE (COMPOSITION); SYNTHESIS (CHEMICAL); THERMAL EFFECTS; X RAY ANALYSIS; X RAY LITHOGRAPHY;

AMORPHOUS SILICON CARBONITRIDE; CARBON SILICON AMORPHOUS MATRIX; COMPLEX CERAMIC MINIATURIZED STRUCTURES; POLYVINYLSILAZANE; POTASSIUM HYDROXIDE; SEMICRYSTALLINE PHASE SEPARATED CERAMIC; SLURRY CASTING TECHNIQUES; X RAY SYNCHROTRON LITHOGRAPHY;

SILICON NITRIDE;

EID: 0030168045     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1996.tb08750.x     Document Type: Article

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