Cross-check of different techniques for two-dimensional power spectral density measurements of x-ray optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5921, Issue , 2005, Pages 1-12

  Yashchuk, Valeriy V ^a   Irick, Steve C ^a   Gullikson, Eric M ^a   Howells, Malcolm R ^a   MacDowell, Alastair A ^a   McKinney, Wayne R ^a   Salmassi, Farhad ^a   Warwick, Tony ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Atomic force microscope; Interferometer; Interferometric microscope; Long trace profiler; Optical metrology; Power spectral density; X ray optics; X ray scattering

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROMAGNETIC WAVE SCATTERING; ERROR ANALYSIS; INTERFEROMETRY; TRANSFER FUNCTIONS; X RAY SCATTERING;

INTERFEROMETRIC SPECTROSCOPE; LONG TRACE PROFILER; POWER SPECTRAL DENSITY;

X RAY OPTICS;

EID: 31844444631     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.619892     Document Type: Conference Paper

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