A model of mechanical polishing in the presence of a lubricant

Technical Physics Letters

Volumn 31, Issue 9, 2005, Pages 788-792

  Popov, V L ^a,b   Filippov, A E ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b DONETSK PHYSICOTECHNICAL INSTITUTE   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 25844488330     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.2061748     Document Type: Article

References (6)

1. G. Nanz and L. E. Camilletti, IEEE Trans. Semicond. Manuf. 8, 382 (1995).
2. L. D. Landau and E. M. Lifshitz, Course of Theoretical Physics, Vol. 6: Fluid Mechanics (Nauka, Moscow, 1986; Pergamon, New York, 1987).
3. M. F. Shlesinger, G. M. Zaslavsky, and J. Klafter, Nature (London) 363, 31 (1993).
4. J. Klafter, M. F. Shlesinger, and G. Zumofen, Phys. Today 49, 33 (1996).
5. G. Zumofen and O. Klafter, Phys. Rev. E 51, 1818 (1995).
6. B. N. J. Persson, O. Albohr, U. Tartaglino, et al., J. Phys.: Condens. Matter 17, R1 (2005).